PSD 的基本特性與應用之研究

The Study of Fundamental Characteristics and Application of Position Sensitive Detector(PSD)

張永威(Young-wei Chang)

國立虎尾科技大學/電機資訊學院/光電與材料科技研究所/碩士(2004年)

摘要

本文針對在 PSD 的基本特性進行研究，除了探討投射在 PSD 上的光點
尺寸對精度的影響外，並以不同頻率的正弦波進行調變，討論振幅檢測與
相位檢測在使用上的差異性；建立了應用時所需的各種特性參數。
為了驗証 PSD 基本特性，本研究針對雷射墨線儀 (Laser Mark) 的調校系
統、干涉儀的信號處理、光槓桿 (Optical Lever) 及聲光偏折器 (AOD，Acoustic
optical deflector) 的基本特性進行一系列的探討，由實驗的結果證明 PSD 在
高精度系統上的可行性。

並列摘要

In this thesis, the basic characteristics of PSD is investigated. Besides the
effect of resolution by the light spot projected on PSD is studied, the difference
of using amplitude and phase detection is discussed by modulation of sine waves
of different frequencies. Futhermore, the necessary characteristic parameters for
applications are established.
In order to verify the basic properties of PSD, the research is focused on a
series of basic qualities of practical system including: calibration system of
Laser Mark, signal processing of interferometer, optical Lever, and acoustic
optical deflector. Experiment results are proved that the application of PSD in
the high precision system is feasible.

參考文獻

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[5] T.G. Carr, et al, "Position-sensitive schottky barrier