環境控制在原子力顯微鏡電性量測上的應用

Environmental Control on AFM Electrical Measurement Applications

陳彥甫

《真空科技》 27卷2期 (2014/06) Pp. 78-81

摘要

原子力顯微鏡（Atomic Force Microscope, AFM）一直是奈米科學研究中一種很重要的工具，樣品不需特殊處理，也可以在氣相與水相等各種環境下量測的優點，使得它的應用從生物活體到材料能源都可涵蓋。本文介紹的環境控制方案，可以避免大氣環境中的水氣與氧氣對量測的影響，對於量測解析度、探針壽命與電性量測等，可以有顯著的提升效果。產業應用如有機太陽能材料、鋰電池與半導體材料等，包含相關的AFM電性應用模式如SSRM與PF-TUNA等，會一併在文中介紹。

並列摘要

Atomic force microscope (AFM) has always been an important research tool in nano-surface science. Its application advantage, includes no special sample treatment and measurement under fluid and ambient condition, make it useful in bio and green material research. This article proposes an AFM environmental control solution to prevent the influence from water and oxygen, which can improve the resolution, tip lifetime and image quality of electrical measurement. The industry applications includes organic solar cell, lithium battery and semiconductor materials, and the related electrical application modes, like SSRM and PF-TUNA, will be introduced.