氫氟酸玻璃薄化製程之安全評估與風險控制

Hazard Evaluation and Risk Control For HF Glasses Thinner Process

鍾佩珍(Pei-Jean Jhong)

指導教授 ： 于樹偉

國立中央大學/工學院/環境工程研究所碩士在職專班/碩士(2008年)

摘要

先進的液晶顯示在外觀與重量上給予消費大眾視覺上的差異，有極大的震撼效果，對於人類的生活帶來相對的便利，如手機薄型化應用、NB輕巧化等，然而在更便利的驅使下，業界對於玻璃輕薄化之需求日漸提升，玻璃薄化的關鍵程序係使用氫氟酸以浸泡或淋洗方式，在一定操作條件下達到薄化要求，氫氟酸蝕刻玻璃非新興製程，卻是首次使用於TFT製程，以往對於氫氟酸危害與風險探討多著墨於半導體業，對於氫氟酸應用於TFT產業則未有深入之危害鑑別與風險評估研究。現代化的安全管理要求在新製程規劃或製程變更設計階段，必須將風險納入考量並將不可接受的風險，以工程控制或管理控制的方法降低風險與災害的發生。本研究係針對TFT產業前端玻璃薄化製程，進行相關之文獻探討進而發展出一套危害鑑別與風險評估工具，以確保薄化製程風險為可接受的。
本研究是JSA、HazOp方法整合SEMI S10二種方法，以定性暨定量之查核評析方法，來針對製程所產生出風險提供有效的鑑別工具，此鑑別工具在執行上非單一人員評核，主要成員係由製程、廠務與風險鑑別單位組合而成，避免因少數人員主觀因素而造成判斷上的錯誤，進而對於所鑑別出之風險提供有效暨系統性的管理措施，以確保高風險作業的安全。

關鍵字

氫氟酸 ； 玻璃薄化製程 ； 危害鑑別 ； 風險評估

並列摘要

Advanced liquid crystal displays have been widely used in modern electronic devices such as notebooks and mobile phones. To meet customers’ demands on weight, user-friendliness, multiple functions, thinner displays have become the latest development trend and the most economic glass thinning process is hydrofluoric acid etching. Hydrofluoric acid etching is a common process in the semiconductor industry but it is seldom used for flat panel display manufacturing. In addition, the concentration of hydrofluoric acid in the glass thinning process is much higher than the acid used in the semiconductor industry.
The glass thinner process consists primarily of units such as hydrofluoric acid soaking and drip washing, hydrofluoric acid dilution and storage, exhaust treatment and waste hydrofluoric acid collection. To achieve desired glass thickness, hydrofluoric acid with 25% concentration is used in the soaking and drip washing unit. Because of the extremely corrosive nature of hydrofluoric acid, hazard identification and risk assessment of the glass thinner process must be conducted and appropriate risk control implemented to ensure the safety of the process and its operations.
Hybrid methodologies are developed for hazard identification and risk assessment of the hydrofluoric glass thinner process. The first method integrates Job Safety Analysis and the SEMI S10 standard for risk assessment while the other method is developed by combining HazOp and SEMI S10. Job Safety Analysis is adopted since the hydrofluoric acid dilution process involves manual hauling of high-concentration hydrofluoric acid drums to the dilution unit. The proposed techniques are capable of providing both qualitative and quantitative risk assessments. Potential hazards and relevant risks with the basic design of the thinning process have been successfully identified with the proposed methodologies.

並列關鍵字

Risk Assessment ； Hazard Identification ； Glasses Thinner Process ； Hydrofluoric Aacid

參考文獻

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