- 學位論文
以電子束微影製作奈米石墨薄膜
Fabrication of Nano Graphite Thin Film by Electron Beam Lithography
並列摘要
Monolayer graphite thin film (graphene) has attracted much attention recently because of its many unique properties and potential applications. In this thesis, we describe the method we developed to fabricate graphene-based device. Mechanical proliferation was used to create thin graphite fakes on the surface of SiO2 which was grown on top of n+ silicon substrate. Optical and Atomic force microscope were then used to identify the position and thickness of the graphene flakes. Electron beam lithography was then employed to make contacts to these graphene flakes. The problems that were encountered and solved in these processes will be are presented and discussed in this thesis.
參考文獻
1. Peierls, R. E., Ann. I. H. Poincare 5, 177-222 (1935).
4. Mermin, N. D., Phys. Rev. 176, 250-254 (1968).
7. Wallace, P. R., Phys. Rev. 71, 622-634 (1947).
8. McClure, J.W., Phys. Rev. 104, 666-671 (1956).
9. Slonczewski, J.C., Weiss, P.R., Phys. Rev. 109, 272-279 (1958).
延伸閱讀
- 賀忻年（2020）。液相剝離法製備石墨烯奈米片應用於電磁波干擾屏蔽〔碩士論文，中原大學〕。華藝線上圖書館。https://doi.org/10.6840/cycu202000424
- Lin, J. C. (2012). 以沾筆式奈米微影術於玻璃基材上製造蛋白質奈米陣列 [master's thesis, National Taiwan University]. Airiti Library. https://doi.org/10.6342/NTU.2012.02453
- 吳家豪、許鉦宗（2005）。利用掃描式沾水筆探針微影技術研製奈米級分子層薄膜結構。科儀新知，(146)，25-31。https://doi.org/10.29662/IT.200506.0003
- 張晁禎（2015）。Using Electron Beam Lithography To Manufacture High-Mobility Graphene Field Effect Transistors〔碩士論文，國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU.2015.02701
- 林宗穎（2009）。Fabrication of Nano-crystalline Silicon Thin Film on Flexible Substrate by Vacuum Arc Discharge.〔碩士論文，大同大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0081-3001201315104107