- 學位論文
高速水洗外氣空調箱性能研究
A Performance Study on High Speed Make-Up Air Unit that using Air-Washer
摘要
在半導體工廠、TFT LCD工廠及電子廠使用大量的化學藥品及特殊氣體，進行化學反應來完成製品的過程，其產生的揮發性氣體及廢氣必須予以全數排除。由於排氣量相當大，故必須採用外氣空調箱(Make-up Air Unit, MAU)供應上述的無塵室來保持室內正壓，避免戶外的汙濁未經處理的外氣進入無塵室中，而影響產品的良率，MAU冷卻負荷占所有廠房的一半以上。 國內高科技廠房現行使用的MAU因多道盤管處理及風速較低(約2~2.5m/s)的情況下，使得MAU體積相當龐大與耗能。本文將進行提高風速達5m/s及控制水洗機(Air washer)噴霧水溫度及流量，探討噴霧水溫及水量對空氣熱力調節過程及風速對擋水板壓損及水洗噴霧管排壓損的影響。 噴霧水量越高即(L/G)比值越大出口會越接近飽和狀態。提升L/G比雖會將露點溫度降低，但會使出口空氣的相對濕度更趨近於飽和狀態，主要原因是因為增加L/G比值在空氣線圖顯示出冷卻除濕線的斜率是不變的，若將L/G比值持續升高(提升噴霧水量)會使出口露點溫度將更接近噴霧水溫。
並列摘要
Semiconductor, TFT LCD factory and electronics factory using a large amount of chemicals and specialty gases and conduct chemical reactions to complete the process of products, volatile gas and exhaust gas must be a full exclusion. The exhaust volume is quite large, it must be used outside the gas air conditioning box (Make-up Air Unit, MAU) to supply above cleanroom future to maintain the pressure, avoid outdoor dirty untreated outside air into the clean room, affect the product yield rate of MAU in cooling load accounted for more than half of all plant. High-tech plant used in MAU due to the multi-channel coil handling and wind speed is low (about 2 ~ 2.5m / s), MAU large of volume and energy consumption . This paper will be to improve wind speed up to 5m / s and control of washing machine (Air washer) spray water temperature and flow rate on the spray water temperature and water to air heat adjustment process and speed the flap pressure loss and washing the spray pipe pressure drop effect. The spray of water (L/G) ratio of the greater exports will be more close to saturation. Enhance the (L/G) lower than, although the dew point temperature, but will make the outlet air relative humidity is more close to saturation, the main reason is because the increase in L / G ratio in the air line graph showing the slope of the cooling dehumidification line is not change, if the L / G ratio continues to rise (to enhance the spray of water) make exports dew point temperature will be closer to the spray water temperature.