- 學位論文
無心滾動超硬合金微細元件鏡面研磨
An Investigation in Polishing Process on the Surface of a Tungsten Carbide Probe with the Rolling Spindle
摘要
本論文主要利用鏡面研磨技術結合高速主軸與滾子機構應用於碳化鎢合金，使微細探針直徑達10μm，透過磨削技術表面粗糙度值可達Ra 0.089 μm以下。本實驗中，吾人自行設計無心滾動鏡面研磨機構，探討於磨削加工中砂輪轉速、切深及乾溼研磨對碳化鎢之影響。 藉由自行設計無心滾動鏡面研磨系統，對碳化鎢進行磨削實驗，使柱狀素材研磨加工後達到鏡面狀態。以乾、濕式研磨加工直徑0.5mm碳化鎢探針約60秒，表面粗糙度可由Ra 0.183μm 降至Ra 0.089μm，表面粗糙度改善率高達49%。 由磨削實驗數據之分析結果得知，當調整輪以正轉5度角順磨、鑽石砂輪砂輪粒度小、高轉速、小切深更有效的降低工件表面之粗糙度，提高鏡面研磨加工精度品質，驗證無心滾動鏡面研磨加工機研磨碳化鎢探針確實具有優異的磨削效能。
並列摘要
This thesis has developed a grinding system, which composes of a rolling spindle mechanism and high speed shaft for making a tungsten carbide micro-probe with 10μm -diameter at the tip. The profile on the micro probe surface is able to reach Ra 0.089μm under the working system. In this experiment, we design a centerless grinder mechanism and discussed the effected about grinding wheel speed, depth of cut and dry-and-wet grinding with tungsten carbide. In the grinding mechanism, experiment on the grinding of tungsten carbide. The clamping diameter of the centerless grinding roller machine ranges from 0.69mm to 0.15mm. The machine grinds and polishes cylindrical materials to a mirror state, capable of dry- and wet-grinding a 0.5mm-diameter tungsten probe. Simply 60 seconds later, the surface roughness is reduced from Ra 0.1831μm to Ra 0.0888μm. The surface roughness improvement rate reaches 49%. The experiment result was analyzed to found out that the angle of the grinding wheel has to be adjusted to positive five degree corner, the diamond grinding process, small-sized wheel, grinding wheel high speed and small-cutting depth effectively reduce the surface roughness of the work piece and improve the quality of the mirror grinding accuracy. It verifies that the centerless mirror grinding mechanism for the tungsten carbide grinding has a superior performance.