高速研磨小角度微米探針

High Speed Grinding Small Angle Micro Probe

黃眉欣(Mei-Xin Hung)

指導教授 ： 黃俊德

國立虎尾科技大學/工程學院/機械與機電工程研究所/碩士(2010年)

摘要

本論文主要利用多軸氣夾具結合探針微米尖端小角度研磨技術，應用於延展性佳的鈀合金及純鎢與極為脆硬的氧化鋯，藉由此系統研磨出微米尖端的探針，且經由實驗證實研磨角度大、轉速高、鑽石砂輪粒度小可提高研磨出微米尖端的探針，並在研磨過程中加入切削劑可減少切屑的干擾，以改善微米針尖的成型。
本實驗選用# 600與# 3,000兩種鑽石帶柄砂輪，配合32,000 rpm、50,000 rpm與53,000 rpm三種轉速研磨鈀合金，探討磨粒、轉速與角度三種研磨關係，另使用本系統製作出微圓柱與微碟片探針。最後使用場發射掃描式電子顯微鏡 觀察所加工的微探針，得以磨削實驗數據之分析結果得知，使用高轉速、小粒度鑽石磨粒、研磨角度大且添加切削劑可使探針針尖達至3μm以下。

關鍵字

多軸氣動夾具 ； 鈀合金 ； 鎢 ； 氧化鋯 ； 研磨 ； 微探針

並列摘要

In response to the characteristics of different probe material, this experiment used a processing method which was not affected by any material properties, to make the probe achieve micron level and facilitate more accurate measurement. This paper used multiple pneumatic grinding spindles to combine with micro cutting-edge technology, and applied to palladium alloy, pure tungsten, and zirconium oxide. By this system, with the experiment which chose the 25μm and 5μm granularity of diamond grinding wheels, with 32,000rpm, 50,000rpm, and 53,000rpm of rotation speeds, and the 13°and 10°of the offset grinding angle between grinding wheel and bar to grind out three grinding parameters of micro sophisticated probes, which were granularity, rotation speed, and the offset grinding angle of grinding wheel and bar, respectively. By this system, it could also grind out various shapes probes, such as cone, cylinder and disc.
From the experimental results, it could be known that the big angle of grinding, high rotation speed, and small granularity could grind out better micro sophisticated probes; and by adding the cutting agent during the grinding process could reduce the chip interference and increase the success rate of grinding out micro sophisticated probes. Therefore, the experiment could grinding out the 0.62μm of cone-shaped probe by using the 5μm granularity of diamond grinding wheel, with 50,000rpm of rotational speed and 13°of grinding angle; it could also make 66.0μm diameter of cylinder and 56.0μm thickness of the disc-shaped.

並列關鍵字

pneumatic grinding spindle ； palladium alloy ； wolfram ； zirconium oxide ； grinding ； micro probes

參考文獻

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