Influence of Linear Guide Arrangement on the Vibration Characteristics of a Positioning Stage

線性滑軌配置對定位平台動態特性之影響

賴元隆(Yuan-Lung Lai) ； 洪瑞斌(Jui-Pin Hung)

《中國機械工程學刊》 33卷2期 (2012/04) Pp. 113-122

https://doi.org/10.29979/JCSME.201204.0003

摘要

本研究應用有限元素法與振動實驗探討線性滑軌對定位平台結構動態特性之影響。研究結果顯示，線軌預壓與安裝跨距會影響定位平台之振動特性，其平行誤差不僅增加鋼珠滾動阻力及接觸剛性，亦導致定位平台之振動頻率偏離於正常狀態。綜合各項分析結果，吾人發現影響定位平台動態特性之因素。同時，證實本文所提出線性滑軌模擬法則，可以正確地分析定位平台在不同組裝條件下之結構動態特性。

並列摘要

This study was aimed at examining the effect of the arrangement of linear guides on the dynamic characteristics of a linear stage through a finite element approach, which was then verified through experimental testing. Current results demonstrate that stage vibrations are greatly affected by the preload and mounting spans of the linear guides, and the mounting error in parallelism not only increases the rolling resistance and the bearing stiffness of the rolling guides, but also causes the stage to vibrate at the frequency, deviating from that of a well- assembled stage. Through this investigation, we discovered the factors affecting the dynamic characteristics of the positioning stage. As a summary, this study verifies that the proposed methodology in modeling the linear guide can accurately analyze the structure dynamic characteristics of the stage under different configurations.

並列關鍵字

Positioning stage ； rolling guide ； contact stiffness ； parallelism error