線性滑軌動態運動之平行度誤差檢測系統研製

Development of a Linear Guideway Running parallelism inspection system

吳永興(Yung-Hsing Wu)

國立虎尾科技大學/工程學院/機械與機電工程研究所/碩士(2007年)

摘要

本研究經由系統規劃與理論分析後，採用高精密度花崗岩底座及Air-Bearing所承載的移動滑臺，結合線性驅動元件、電子式位移計擷取滑塊在線性軌道上移動時的相關動態誤差數據。線性滑軌動態運動平行度誤差檢測系統為機構、控制及數據分析軟體的整合設計，並經裝配、相關控制參數調整與測試完成一組動態檢測系統，利用即時檢測的數據結果描繪出線性滑軌動態運動平行度誤差曲線，並依據標準做產品等級的判定及輸出相關品質文件。目前系統量測速度可達3000mm/min，並可達到精密級線性滑軌量測的需求。

並列摘要

In this study, we used high precision hand lapped diabase granite base and air-bearing bridge type stage, accompanied with linear driving devices and transducers, to analyze the dynamic data of an object block moving on the linear guideway. The linear guideway running parallelism inspection system is designed with an integration of machinery, control and data analysis software. This dynamic inspection system is accomplished by installation, adjustment of the related control parameters and examination. The in-situ detection of this system can provide the curve of linear guideway running parallelism, and then judge the grade of product with the output of quality report. Until now, the system can achieve 3000 mm/min on inspection, and can meet the measurement requirement of a precision grade linear guideway.

參考文獻

[7] PMI CD Catalog，Ver. 1.0，Ballscrew PDF Catalog Traditional Chinese Version，pp.5-32，2004.

[1] 林茂興，線性滑軌滑塊與軌道介面剛性和阻尼值的驗證，國立中興大學機械工程研究所碩士論文，民國89年。

[2] 陳正恭，線性滑軌剛性分析與截面設計，大葉大學機械工程研究所碩士論文，民國94年。

[3] 李東益，線性滑軌接觸預壓力之振動特性與模態分析，華梵大學機電工程研究所碩士論文，民國95年。

[4] PMI CD Catalog，Ver. 1.0，Linear Guideway PDF Catalog Traditional Chinese Version，pp.27-48，2004.