Development of a Radial Error Measurement Device for Rotary Tables

微型迴轉工作台徑向誤差量測裝置之研製

李浩瑋(Hau-Wei Lee) ； 林文祥(Wen-Hsiang Lin) ； 劉建宏(Chien-Hung Liu)

《中國機械工程學刊》 35卷2期 (2014/04) Pp. 149-156

摘要

一般來說旋轉系統都存在徑向和傾斜誤差。傳統旋轉系統的旋轉誤差量測是利用標準件（如標準球或標準棒）和電容式探頭進行量測。然而對於大部分的微型轉台，這類量具過於寵大，故本文提出一種簡單的高解析旋轉誤差量測設備。該設備是將凹面鏡安裝在旋轉台的主軸上。量測設備的光源是DVD光碟機的光學讀頭，並原先DVD讀頭上的光電感測器更換為四象限感測器（QPD）。當雷射光經凹面鏡反射後會回到DVD光學讀頭並投射至QPD上。透過凹面鏡的光學特性以及幾何光學的計算即可得到主軸的旋轉誤差。實驗結果顯示量測設備的解析度約為0.03毫米，殘餘誤差和標準差各為±0.1毫米以及0.03毫米。本研究利用一台真圓度量測儀來進行量測設備的測試與示範。真圓度機的旋轉誤差在4、6以及10RPM的轉速下各為1.064毫米、1.066毫米以及1.099毫米。經過誤差分離後，得到真圓度量測儀的徑向誤差為0.15毫米，傾斜誤差為4.2弧秒。

並列摘要

Traditionally radial error measurement in a rotational system has been made using a standard test object (such as a ball or cylinder) and capacitance probes. However, such a setup is too large for use in most miniature rotational systems and this study presents a simple solution. This high-resolution radial error measurement device uses a plano-concave mirror fixed onto the spindle of the rotational system to be measured, a modified DVD optical pickup and a quadrant photodiode detector (QPD). The photodiodes in the DVD optical pickup are replaced by the QPD and the plano-concave mirror reflects the incident laser beam back through the DVD optical pickup and onto the QPD. Radial errors are detected as changes in position of the reflected beam. The amplitude and direction of the radial errors can easily be measured according to the principles of geometrical optics. A roundness measuring machine was used to test the proposed system and the results showed a measured resolution of about 0.03μm. The residual error and standard deviation are about ±0.1μm and 0.03μm, respectively. The radial errors shown by the roundness measuring machine were 1.064μm, 1.066μm and 1.099μm at spindle speeds of 4, 6 and 10RPM, respectively.

並列關鍵字

quadrant photodiode detector ； radial error ； DVD pickup ； plano-concave mirror