Hybrid Electrochemical Micro-Machining Method of Tungsten Microprobe in Batch Production

複合電化學微加工應用於鎢探針的批量製造

洪政豪(Jeng-Haur Horng) ； 林育成(Yu-Cheng Lin) ； 余佳峻(Chia-Chun Yu) ； 蔡宏榮(Hung-Jung Tsai)

《中國機械工程學刊》 38卷5期 (2017/10) Pp. 435-443

摘要

In this study, a hybrid method of grinding and electrochemical micro-machining was used to manufacture tungsten microprobes in order to decrease the cost of commerical microprobes and to improve their performance in the batch production process. For each tungsten microprobe product, the machining time of the hybrid process was reduced by 48% compared to the pure grinding process and 94% compared to the pure electrolysis process. Moreover, the hybrid-process product’s surface roughness was better than that of the tungsten microprobe produced by the pure grinding process. Using the new process to batch produce tungsten microprobes, four-point probe measurement instrument can be manufactured with higher sensitivity than those produced by the pure grinding machining or commercial electrolysis method. We also proposed the concept of the microcontact model to explain the contact performance of microprobes. The theoretical results exhibit good agreements with the experimental data collected using four-point probe instruments and verify the good sensitivity of microprobes produced by the hybrid process.

關鍵字

Electrolysis ； EMM ； Grinding machining ； Machining time

並列摘要

本研究整合研磨加工與電化學微加工優點應用於不同電解條件下的鎢探針製造。此案例分析的目標是在批量製造中改進商用探針之製造成本並提高探針性能。經由此整合方法製造出的探針比純研磨加工探針可節省加工時間48%；比純電解加工探針減少時間94%，同時其表面粗糙度也優於純研磨加工的表面品質。經由四點探點機台驗證，也發現其靈敏度性能優於純研磨加工與純電解加工的鎢探針。同時我們使用微接觸理論中真實接觸面積觀念也證實此整合製程的接觸靈敏度為何較優的理由。