Simulation Model Establishment and Experimental Verification for Cutting of Trapezium Groove on Single-Crystal Silicon Nanochannel to Expected Depth and Expected Width

加工單晶矽奈米流道梯形凹槽到預定深度及寬度之模擬模式建立及實驗驗證

林榮慶(Zone-Ching Lin) ； 陳博彥(Po-Yan Chen) ； 方信人(Xin-Ren Fang)

《中國機械工程學刊》 39卷6期 (2018/12) Pp. 545-554

摘要

The paper uses specific down force energy (SDFE) equation and two-pass offset cycle cutting method to further derive the required equations of total offset amount of probe for cutting of trapezium groove on nanochannel to expected depth and expected width, probe offset amount of two adjacent cutting passes, number of cutting passes and upward height value at the bottom. Finally, the paper establishes a method for simulation of cutting of trapezium groove on nanochannel to expected depth and expected width. The paper also uses atomic force microscopy (AFM) to carry out experimental verification of nanocutting. The paper uses the total offset amount of probe to estimate the number of cutting passes on each cutting layer, and then substitutes the probe offset amount of the adjacent mutual cutting passes in the calculation equation of upward height at the bottom of trapezium groove, thus achieving the upward height value at the bottom of trapezium groove The paper also proposes that the upward height value at the bottom should be converged at below the set objective convergence value. If the upward height value at the bottom calculated from the estimated two adjacent cutting passes exceeds the objective convergence value, one more cutting pass should be added until the upward height value at the bottom below the objective convergence value, then the probe offset amount of the two adjacent cutting passes and the number of cutting passes on the cutting layer are obtained by calculation. In order to prevent the probe from being broken during cutting for multiple times, we set a safety coefficient for the maximum permissible downward force of AFM probe. The maximum downward force under the safety coefficient is just the maximum downward force that the paper permits to use. Finally, experimental verification is employed to prove that the theoretical model and simulation method developed by the paper for cutting of trapezium groove on nanochannel to expected depth and expected width are reasonable.

關鍵字

atomic force microscopy(AFM) ； silicon substrate ； trapezium groove on nanochannel ； width ； depth

並列摘要

本文用比下壓能公式及兩道次偏移循環加工法，進一步推導出加工奈米流道梯形凹槽到預定深度與預定寬度所需的探針總偏移量，相鄰兩切削道次的探針偏移量，切削道次數目及底部凸起的公式。最後建立加工奈米流道梯形凹槽到預定深度及預定寬度的模擬方法，並用原子力顯微鏡進行奈米切削實驗驗證。本文用探針總偏移量來估算每一切削層的切削道次，再將其相鄰相切削道次的探針偏移量代入梯形凹槽底部突起的底部上凸值計算公式，得出梯形凹槽底部突起的底部上凸值。本文並提出底部上凸值應收斂在所設定之目標收斂值內。假如估算之相鄰兩切削道次所計算出的底部上凸值超出目標收斂值，則再多加一切削道次，直到由計算所得之相鄰兩切削道次的探針偏移量及切削道次數目，進一步計算出的梯形凹槽底部上凸值可收斂在目標收斂值內，即可得出所需的每一切削層的相鄰兩切削道次的探針偏移量及切削道次數目。我們為了避免探針在切削多次時產生斷裂，因此我們在AFM探針的最大容許下壓力設了安全係數，在安全係數下之最大下壓力為本文可允許允許使用的最大下壓力。最後利用實驗驗證來證實本文所建立的加工奈米流道梯形凹槽到預定深度及預定寬度的理論模式及模擬方法為合理的。