Simulation Model and Equations for Fabrication of Connecting Straight Line Segment with Arc Nanochannel to the Expected Width and Expected Depth and Verification of Atomic Force Microscope Fabrication Experiment

加工直線段連結圓弧之奈米流道到預定寬度及預定深度之模擬模式和公式及原子力顯微鏡加工實驗驗證

林榮慶(Zone-Ching Lin) ； 秦英傑(Ying-jie Qin)

《中國機械工程學刊》 41卷5期 (2020/10) Pp. 527-538

摘要

This paper proposes a simulation model and equation for fabrication of a nanochannel trapezium groove that has straight line segment connected with arc of 1/4 circle, to the expected width and expected depth, and uses the simulation model to obtain the total offset amount of probe, the number of cutting passes on each cutting layer, the probe offset amount between two cutting passes, equation of protruding height value on the bottom, downward force of each cutting pass on each cutting layer, number of near arc of 1/4 circle shaped tiny line segments and length of each tiny line segment. After that, the paper conducts atomic force microscopy (AFM) experiment of integrated straight line segment and arc of 1/4 circle fabrication of nanochannel trapezium groove, with fabrication to the expected width and expected depth. Finally, the fabrication results obtained from AFM experiment are measured, verifying that the simulation model and equation proposed by the paper are feasible and acceptable. The paper also derives a straight line equation required for measurement of the cross-section of the tiny line segments of near arc of 1/4 circle during measurement, and the method for measurement of cross-section. To sum up, the abovementioned simulation model and equation, and the AFM experiment and measurement method proposed in this paper have academic innovativeness and application value.

關鍵字

Atomic Force Microscopy ； arc ； offset fabrication method of two cutting passes ； expected width ； expected depth

並列摘要

本文提出加工直線段連結1/4圓弧之奈米流道梯型凹槽到預定寬度及預定深度的模擬模式及公式，和用模擬模式所得的探針總偏移量，各切削層的切削道次及兩切削道次間的探針偏移量、底部凸起公式，及各切削層的各切削道次的下壓力，和近似1/4圓弧的各微小線段的數目及各微小線段的長度，去進行原子力顯微鏡（AFM）實驗加工到預定寬度及預訂深度的整合直線段加工及1/4圓弧加工的奈米流道梯型凹槽。最後並量測AFM實驗加工所得之結果，驗證本文所提出的模擬模式及公式為合理可接受。本文並推導出進行量測時，針對近似於1/4圓弧曲線的微小線段量測斷面所需的直線方程式，以及量測斷面的方法。綜上所述，本文所提出的上述模擬模式及公式，和AFM實驗及量測方法具有學術創新性及應用價值。