利用直流磁控濺鍍法製備CrN鍍層於氮氧化處理Dievar工具鋼之機械性質與腐蝕行為研究

Investigation of the Mechanical Properties and Corrosion Behaviors of CrN Films on Oxynitriding-Treated Dievar Tool Steel by DC Magnetron Sputtering Process

張世賢(S.H. Chang) ； 陳建維(C.W. Chen) ； 蕭文鈺(W.Y. Hsiao) ； 蔡秉昌(B.C. Tsai) ； 黃瀚賦(H.F. Huang)

《鑛冶：中國鑛冶工程學會會刊》 65卷4期 (2021/12) Pp. 65-75

https://doi.org/10.30069/MM.202112_65(4).05

摘要

本研究是以直流磁控濺鍍法製備氮化鉻（CrN）鍍層於氮氧化處理後的Dievar工具鋼，實驗參數為改變不同的基板偏壓（-25、-50、-75及-100 V），並且分別藉由XRD分析、壓痕試驗、硬度試驗、磨耗試驗與SEM表面形貌分析等評估CrN鍍層的性質。研究結果顯示，Dievar工具鋼經過氮氧化處理後，能夠形成深度約50.2μm的氮氧化層，且表面硬度達到1000 HV_(0.05)。而使用直流磁控濺鍍法，經由適當的氣體流量（Ar/N_2為45/30 sccm）和基板溫度（300°C）、工作壓力為0.8 torr、偏壓為-25 V，以及鍍膜時間為180分鐘時，所製備的CrN鍍層，擁有最佳的機械性質。在磨耗試驗中，其具有最低的磨耗體積損失量，其中荷重2 N 下之磨耗率為2.03'10^(-6) mm^3．m(-1)．N^(-1)，荷重4 N下之磨耗率為1.54'10^(-6) mm^3．m^(-1)．N^(-1)，顯示擁有較優異的耐磨性質；壓痕測試中CrN鍍層之附著性均為HF 1-2等級。整體而言，Dievar工具鋼經過適當之複合表面處理後，確實能夠有效地改善表面性能，達到提升使用性能與延長壽命之目的。

關鍵字

磁控濺鍍 ； 氮化鉻 ； 氮氧化處理 ； Dievar工具鋼 ； 磨耗試驗

並列摘要

This study utilized the DC magnetron sputtering process to make the CrN coating on the ONC treated Dievar tool steel. The experimental parameter was the different substrate bias (-25, -50, -75 and -100 V, respectively). Furthermore, the properties of the CrN coating were measured using XRD analysis, indentation test, hardness test, wear test, and SEM surface morphology analysis, respectively. The experimental results showed that Dievar tool steel can form an effective oxynitriding layer with a depth of about 50.2 μm after the oxynitriding treatment. Meanwhile, the surface hardness increased to 1000 HV_(0.05). On the other hand, the duplex coating layers exhibited optimal properties when the CrN films were treated at an appropriate gas flow rate (Ar/N_2 was 45/30 sccm) and deposition temperature (300°C), the working pressure was 0.8 torr, the bias was -25 V, and the deposition time was maintained at 180 min. The CrN coating had the best wear resistance (the lowest wear rate when the load of 2 N and 4 N was 2.03'10^(-6) and 1.54'10^(-6) mm^3．m^(-1)．N^(-1), respectively) and good adhesion (HF 1-2). Overall, the test results showed that the duplex surface treatment could effectively improve the properties of Dievar tool steel and extend the tool life.

並列關鍵字

Magnetron Sputtering ； CrN ； Oxynitriding Treatment ； Dievar Tool Steel ； Wear Test