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Effect of Filament Position on Diffused Plasma Parameters

並列摘要


A transverse magnetic field (TMF) separates the source and target regions of a double plasma device. Two sets of tungsten filaments, placed at different distances from the TMF, are then used to produce plasma alternately, and the plasma parameters in the source and target regions for different discharge voltages and discharge currents are measured using Langmuir probes. The plasma parameters are considerably influenced by the position of the filaments.

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Tsai, H. S. (2015). 新穎簡易電漿佈植輔助製程應用於單元素二維材料合成及材料性質量測 [doctoral dissertation, National Tsing Hua University]. Airiti Library. https://doi.org/10.6843/NTHU.2015.00200
Lin, C. Y. (2014). 石墨烯電容式觸控面板 [master's thesis, National Tsing Hua University]. Airiti Library. https://doi.org/10.6843/NTHU.2014.00558
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