陣列式陽極氧化鋁製備一維奈米線之研究

Making Nano-Wires by Using Anodic Alumina Oxide Templates

郭金國(Chin-Guo Kuo) ； 童亞潔(Ya-Chieh Huang)

《鑄造工程學刊》 34卷2期 (2008/06) Pp. 22-27

https://doi.org/10.29809/JTFS.200806.0003

摘要

本研究在99.7%的鋁基材上製備出不同參數的陽極氧化鋁(AAO)模板：利用草酸及硫酸兩種電解液獲得直徑80 nm與30 nm尺寸大小的孔洞。之後再利用直流電壓定電流電鑄和脈衝式電壓電鑄兩種方式進行電化學沉積，以陽極氧化鋁模板做為基板，將銀及銅離子填入模板內，並製得陣列式金屬銀、銅奈米線材。將所製得的陣列式金屬銀、銅奈米線材進行微結構的分析，而其分析結果是利用掃描式電子顯微鏡(SEM)與原子力顯微鏡(AFM)作表面型態及膜厚量測，另外再利用X-光繞射分析儀(XRD)與能量成份分析儀(EDS)分析其晶體結構與元素成份等。

關鍵字

電鑄 ； 模板 ； 奈米線

並列摘要

This research based on the fabrication of anodic aluminum oxide (AAO) template with different parameters and the 99.7% aluminum plank. The AAO film templates were produced to have two sizes of nano-pores (30 nm and 80 nm in diameter) by two types of electrolytes, oxalic acid and sulfuric acid. The second phase of electrochemistry deposition was conducted by the constant-current electroform and impulse-voltage electroform. The foundation plate for deposition was the anode aluminum oxide template. The silver and copper nano-array- wire is obtained by filling the plate with Ag and Cu atom. Afterwards, the microstructure analysis of Nanowires have been performed. The surface appearance and thickness of galvanized membrane were analyzed by the scanning electron microscope and the atom force microscopy. The crystal structure and element components were analyzed by the X-ray diffraction. The electronic properties of sliver oxide and copper oxide will be measured in the future.

並列關鍵字

electroform ； template ； nanowire