改良陽極氧化鋁方法製作奈米多孔性氣體感測器

Fabrication of Nanoporous Gas Sensors Using Anodic Aluminum Oxidation Process

吳聲波(Sheng-Po Wu)

指導教授 ： 呂志誠

國立臺北科技大學/機電學院/機電整合研究所/碩士(2010年)

摘要

本研究提出陽極氧化鋁法(anodic aluminum oxide, AAO)與微機電系統(MEMS)整合之技術，並且使用二氧化錫(SnO2)當作氣敏材料(gas-sensitive material)的奈米多孔(nanoporous)氣體感測器。利用陽極氧化鋁技術製作奈米多孔氧化鋁膜，取代易受光學解析度所限之傳統光微影技術，接著以乾蝕刻製程步驟將奈米多孔氧化鋁膜作為遮罩，於二氧化矽表面上形成多孔化結構，並且於其表面沉積奈米級二氧化錫薄膜，使得氣敏材料面積大幅地增加，亦提升氣體感測工作範圍。本研究完成了感測器結構的製作，經由氣體測試驗證了多孔性的表面特性，並且將氣敏材料施加退火(anneal)進行一氧化碳測試，濃度分別為300 ppm、500 ppm與1000 ppm，成功的証實氣體感測器可在相對較低之工作溫度下有較佳的靈敏度。藉由本研究成果，陽極氧化鋁方法技術可應用於智慧型生化感測器，並且提供了未來整合技術之需。

關鍵字

微機電氣體感測器 ； 陽極氧化鋁 ； 多孔薄膜 ； 二氧化錫

並列摘要

An integrated technology that anodic aluminum oxide (AAO) method and micro- electromechanical systems (MEMS) were proposed. And tin dioxide (SnO2) was used as gas-sensitive material of the nanoporous gas sensors. Firstly, it made use of AAO to manufacture nanoporous alumina membrane to replace limited optical resolution of traditional optical lithography. Secondary, it utilized a dry etching process steps to make nanoporous alumina membrane as a mask manufacture the formation of porous structure on the silica surface. Finally, its tin dioxide been deposited on the porous silica surface to let the area of gas sensing material increase and enhance the working scope of gas sensors. This study completed a sensor structure. By the gas test verified the porous characteristics of the surface. And the gas-sensitive materials be applied annealing for carbon monoxide testing, concentrations were 300 ppm, 500 ppm and 1000 ppm. It was successfully confirm that the gas sensor had better sensitivity at relatively lower operation temperature.

並列關鍵字

MEMS gas sensors ； Anodic aluminum oxide ； Porous film ； Tin dioxide

參考文獻

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