玻璃蝕刻凹槽中之向列型液晶通道光波導

液晶在電場作用下的分子轉向特性，可產生較大的折射率變化，亦可在光波中的電場作用下進行分子轉向，產生很強的光學非線性。目前液晶應用於光波導的研究中，大多是作為披覆層，用以調變傳輸光波的相位，在本篇論文中，使用液晶作為光波導的核心層來傳輸光波，而以玻璃作為披覆層與液晶容器，藉由施加電壓於氧化銦錫透明電極上，而達到調控光波之目的。實驗上是在玻璃基板上製作半圓形的蝕刻凹槽，再以射頻磁控濺鍍法沈積氧化銦錫與氧化矽薄膜，然後以鍍有氧化銦錫薄膜的玻璃基板覆蓋於其上，在注入液晶與膠封後，製成液晶通道光波導。所製作的元件可在低電壓下進行操作，可較有效調控傳輸光波的強度或相位，未來可作為光積體電路中的重要元件。

關鍵字

液晶；光波導；氧化銦錫

並列摘要

Molecular reorientation of liquid crystal (LC) in electric field can produce a large refractive index changes. Besides, the electric field of the lightwave also induces LC molecular reorientation and thus strong optical nonlinearity. In the previous studies, LC is mostly used as cladding layer of optical waveguide to modulate the phase of lightwave. In this work, LC is used as waveguide core to transmit lightwave, and glass is use as cladding layer and LC container. The lightwave propagating in LC can be effectively modulated by applying voltage on ITO (indium tin oxide) transparent electrodes. In experiment, ITO and silica films are deposited by RF magnetron sputtering on glass substrate with semi-circular etched groove. After infiltrating LC into the groove and sealing, the LC optical channel waveguide is finished. The produced LC devices can be operated under a low voltage to effectively modulate the intensity and phase of the transmitted lightwave. In future, it can be an important component in integrated optical circuits.

並列關鍵字

Liquid Crystal ； Optical Waveguide ； Indium Tin Oxide

國際替代計量

玻璃蝕刻凹槽中之向列型液晶通道光波導

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