新穎人工氧化物超晶格

人工超晶格(artificial superlattices)為週期性堆疊的奈米多層膜結構材料體系，在許多領域例如光學、磁性、鐵電系統等皆可以被廣泛的應用。人工超晶格最大的優勢在於材料在奈米等級下相較於塊材系統擁有更大的晶格彈性，因此在不同材料相接時，得以將晶格的應變量最大化，同時也能放大材料的量子效應，使材料能夠展現出更豐富的物理性質。目前有許多薄膜製程方式可被用來製作超晶格，而為了能達到週期堆疊的精準度，分子束磊晶法與以脈衝雷射剝鍍為基礎的雷射分子束磊晶法，得到的超晶格薄膜之品質遠優異於其他傳統的方法。在本文中，我們將簡述以複雜氧化物材料為主的超晶格之研究發展，其藉由原子等級的沉積，可精準地控制薄膜週期厚度與組成分布，得以純化各組成單元之氧化物的耦合狀況，並將其物理性質之間的交互作用最佳化。而後，我們將介紹近年來幾種新穎的氧化物超晶格系統與其功能與特性。

關鍵字

人工超晶格；功能性材料；複雜性氧化物；脈衝雷射沉積法；分子束磊晶法

並列摘要

Artificial superlattices are the multilayer systems composed of two or more nano-scale thin films that are in periodically alternative stacking. They have been widely applied to various research fields such as optics, magnetics, ferroelectrics, hard coatings. In artificial superlattices, each constituent is usually several nanometers that can have much larger lattice elasticity than its bulk counterpart and then maximize the lattice strain. Simultaneously, the periodic stacking architecture can also amplify the quantum effect of the materials in nano-scale, presenting abundant novel physical properties. Among numerous thin film processes, molecular beam epitaxy (MBE) and pulsed laser ablation based MBE methods exhibit great superiority over others because of their ability in precise control of stacking layer thickness. In this article, we have focused on the recent development of the complex oxide superlattices. Through the assistance of the atomic-scale deposition, the sublayer thickness, the composition distribution, and structural coupling between components in superlattices can be accurately controlled to optimize the interaction between different functionalities. An in-depth understanding and breakthroughs for recent oxide superlattices are also highlighted. This article concludes with a brief discussion on potential directions and perspectives along this research field.

並列關鍵字

artificial superlattices ； functional materials ； complex oxides ； pulsed laser ablation deposition ； molecular beam epitaxy

國際替代計量

新穎人工氧化物超晶格

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