穿透式電子顯微鏡的臨場觀測介紹

Introduction to in-situ Observation in Transmission Electron Microscope

詹敦潔(D. J. Jhan) ； 李育全(Y. C. Lee) ； 薛宇翔(Y. H. Hsueh) ； 呂煉明(L. M. Lyu) ； 蕭開元(K. Y. Hsiao) ； 呂明諺(M. Y. Lu)

《真空科技》 35卷1期 (2022/03) Pp. 9-20

摘要

隨著高科技研究不斷精進，元件尺寸微小化，分析方法也不斷的進步，以求符合元件與材料分析需要。其中，穿透式電子顯微鏡（Transmission Electron Microscope, TEM）是窺探微小世界的工具中，相當傑出的儀器。TEM提供高解析原子成像，大大提升前瞻科學研究的品質，而與TEM結合的臨場觀測研究是近年來熱門的研究領域，讓我們在通電或加熱等情況下，觀察材料的結構或相變化，並深入探討其反應動力學。本文將介紹TEM的臨場觀測研究類型，並分享臨場加熱、通電及在加熱環境下通氣的實例來探討其在材料科學研究上的應用。

並列摘要

With the technology developed, the techniques for materials analysis have been continuously improved accordingly. Among them, the transmission electron microscope (TEM) is one of the important instruments for realizing the crystal structures and compositions at atomic scale. Recently, the combination of the TEM and in-situ observation has been attracted much attention, which allows us to observe the changes of the materials in real time with different external sources, such as heating, and biasing. This article will introduce the study of in-situ observations in TEM.