可調適光學關鍵元件的設計與製作

Design and Fabrication of Critical Components in Adaptive Optics

劉彥良(Yen-Liang Liu) ； 林美妏(Vinna Lin) ； 蘇國棟(Guo-Dung John Su)

《科儀新知》 183期 (2011/08) Pp. 4-18

https://doi.org/10.29662/IT.201108.0001

摘要

可調適光學可以修正被扭曲的波前，是一種改善光學系統成像品質的技術。天文觀測、雷射、非線性光學、視光學及國防工業中，皆可見可調適光學的應用。本文將介紹如何設計與製作其中的光學關鍵元件：微透鏡陣列與可形變反射鏡，與它們在可調適光學中的應用。本文將展示毫米等級長焦（一般為數百微米）且多種佈陣模式的微透鏡陣列的製作方式，並將其應用於Shack-Hartmann波前感測器，以印證設計與製作成果。另一方面，我們將展示直徑20毫米、67個六角形驅動電極的大幅度可形變反射鏡，並以實驗證實可形變反射鏡在波前修正的成果。

並列摘要

Adaptive optics is a technology that improves the performance of optical systems by reducing wavefront distortion. Currently, it is playing a more important role in astronomy, laser physics, nonlinear optics, medicine, vision and the defense industry. This paper demonstrates how we design and fabricate critical components, microlens array (MLA) and large-stroke MEMS (microelectromechanical system) deformable mirror, in adaptive optics and their applications. We present MLA with long focal length (millimeter range, which is usually several hundred microns) in various structures and arrangements. We use finished MLA on Shack-Hartmann wavefront sensors to evaluated the performance. On the other hand, we demonstrate a large-stroke MEMS deformable mirror with a 20 mm diameter circular opening and 67 hexagonal actuation electrodes. The polymer deformable mirror is a strong candidate for active wavefront control, based on our experimental results.