A Web-based Distributed Computing Environment of High Density Plasma Simulations

網路分散式計算環境之高密度電漿模擬

蔡俊輝(Jyun-Hwei Tsai) ； 蕭志榥(Jr-Huang Shiau) ； 邱崇哲(Chung-Je Chiou)

《中國航空太空學會學刊》 33卷2期 (2001/06) Pp. 127-136

https://doi.org/10.6124/TAASRC.200106_33(2).09

摘要

本文主要是展示一「二維的電子磁璇共振高密度電漿源自治流體」模型，計算電子與離子的傳輸模式以及有限差分法解時變電磁場。此電子磁璇共振高密度電漿源的模擬平台是建立在國家高速電腦中心所發展的「網路分散式模擬計算分析工具」(SEAT)環境，模擬之氣體爲氬氣，工作氣壓在3 mTorr與10 mTorr。本文旨在探討兩種不同模式的微波(TM01 and TE01)T所產生氬離子電漿，對於其不同之物理特性（電漿密度與微波功率的吸收）進行比較與討論。

關鍵字

電感耦合式電漿源 ； 高密度電漿源 ； 電子磁璇共振 ； 電漿設備模型 ； 網路分散式模擬計算環境

並列摘要

In this paper, we present a self-consistent, two-dimensional (2D) fluid model for ECR high-density plasma. The transport models of the electrons and ions, and the time-varying electromagnetic fields, which based on the Maxwell's equations and FDTD method, are solved. The simulation of ECR plasma is performed in the framework, so-called, SEAT-a Web-based distributed computing environment that is developed at the NCI-IC. The results (plasma densities and power deposition) of the argon plasma with the background pressures of 3 and 10 mTorr by two different modes of microwave sources, i.e. TM01 and TE01, are compared and illustrated.

並列關鍵字

Inductively coupled plasma source ； High-density plasma ； Electron cyclotron resonance ； Plasma equipment model ； Web-based distributed computing environment