Striped Droplet Deposition on Patterned Surfaces Using Inkjet-Printing Method

Chin-Tai Chen ； Chung-Yi Hsu ； Ching-Long Chiu

《淡江理工學刊》 10卷2期 (2007/06) Pp. 107-112

https://doi.org/10.6180/jase.2007.10.2.02

並列摘要

Striped droplet deposition represents a novel non-photolithographic scheme, which is based on current ink-jet printing technique and self-alignment for implementation of microfabrication. Generally thought to be one of soft-lithographic systems, this scheme provides a low-waste, high-speed, and cost-efficient process for the formation of microstructures in Microelectromechanic systems (MEMS) field. We reported a number of generated striped patterns, which differ from conventional ones on the non-planar shapes, typically featuring a convex shape, a width of 180μm, and a height of 12μm in the study. Moreover, the 1×54 arrays of the above striped micro-meter structures deposited by transparent polyurethane (PU) droplets were fabricated by inkjet technique, measured for 2-D/3-D profiles by laser-scanning facility, and thus examined by optical microscopy (OM) and scanning electron microscope (SEM) for their topography. Those generated patterns were smooth on surfaces and therefore useful on the potential applications, such as lens-array chips and waveguide devices etc.

並列關鍵字

MEMS ； Inkjet ； Droplet ； Striped Pattern ； Soft Lithography