Structural Characterization of DLC films Using Raman Spectroscopy

類鑽碳膜之拉曼光譜結構分析

方治國(Chih-Kuo Fang)

《國立宜蘭大學工程學刊》 7期 (2011/12) Pp. 93-116

https://doi.org/10.6176/BCE.2011.07.18

摘要

類鑽碳為一準穩態之非晶型碳，在機、電、光特性上具有獨特之組合。由於其具有低摩擦係數及高耐磨耗性，故在磨潤應用上為一上選之材料。其關鍵特性－sp^3鍵結－賦予類鑽碳擁有鑽石的許多特性，例如機械硬度、化學及電化學鈍性、及寬能隙等。由於拉曼光譜術在碳材之鍵結結構研究上是一種較簡便且非破壞之工具，可作為結構之特徵辨識。本文針對碳材，特別是類鑽碳膜之拉曼光譜提供一系統化之探討。內容涵蓋拉曼光譜之曲線擬合及譜帶分解，以及區域性鍵結結構、基材、及激發能量等光譜之影響。

關鍵字

拉曼光譜 ； 類鑽碳 ； 結構特性 ； 鍵結

並列摘要

Diamond like carbon (DLC) is a metastable form of amorphous carbon with a unique combination of desirable mechanical, electrical and optical properties. It is a good candidate for the tribological applications due to its low friction coefficient and high wear resistance. The key property of DLC- its sp3 bonding - confers on DLC many of the properties on diamond itself, like mechanical hardness, chemical and electrochemical inertness and wide band gap. Raman spectroscopy is a relative simple and nondestructive tool for studying bonding configuration of carbon material and can be used as a fingerprint for identification. This article provides a systematic review on the Raman spectroscopy of carbon materials, in particular, diamond-like carbon films. It covers the curve fitting and decomposition of Raman spectra, and the effects of local bonding structure, substrate, and excitation energy, etc., on the spectra.

並列關鍵字

Raman spectroscopy ； Diamond-like carbon ； Structural Characterization ； Bonding