類鑽碳薄膜在不同厚度與不同底材之機械性質比較

The comparison of mechanical properties of diamond-like carbon films under different film thickness and different substrates

江平祺(Ping-Chi Chiang)

指導教授 ： 魏哲弘

大同大學/工程學院/機械工程學系所/碩士(2004年)

摘要

類鑽碳薄膜(Diamond-like Carbon Films, DLC)擁有許多優點，如高硬度、低摩擦係數、耐化學腐蝕、生物相容性等，因此廣泛應用於抗磨耗保護層，光學保護膜，生物檢測晶片的護膜等。由於薄膜應用的厚度已接近50nm，此種薄膜在不同厚度下與不同基材下的機械性質，將影響其性能。奈米壓痕試驗為量測薄膜性質的重要工具，當膜厚日益縮小時，了解底材效應如何影響整體機械性質將有助於了解奈米壓痕試驗所得的複合機械性質的意義。我們利用PECVD 方式將DLC 鍍在矽及玻璃基板上，並利用奈米壓痕試驗及拉曼光譜探討DLC 膜石墨化與厚度的關係及其如何影響楊氏係數與硬度。結果發現DLC 膜在不同基材上，其機械性質對於厚度的影響並不相同。

關鍵字

類鑽碳薄膜 ； 奈米壓痕 ； 底材效應

並列摘要

The diamond-like carbon (DLC) film comes with many advantages including a high hardness, a low friction coefficient, an excellent chemical corrosion resistance and a good biological compatibility, and thus DLC films are used extensively in wear-resisting protective layers, optical protective layers, and the protective layer for biological inspection chips. Since the thickness of the film approaches 50nm, therefore the mechanical properties of such film of different thicknesses and/or different substrates will affect its performance. The nano indentation test is an important tool for measuring the properties of the film. As the thickness of the film becomes smaller and smaller, understanding the substrate effect on the overall mechanical property is helpful in learning the significance of the complex mechanical property obtained from the Nanoindentation test. The PECVD method is generally adopted to plate silicon on a glass substrate and the nanoindentation test and a Raman spectrometer are used to explore the relation between the DLC bonding ratio and thickness and its way of affecting the coefficient of Young’s modulus and hardness. The results show that there exists a different effect of the thickness on the mechanical property of a DLC film deposited on a different substrate.

並列關鍵字

DLC ； nanoindentation ； substrate effect

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