利用刮痕試驗探討DLC膜層之附著性研究

Adhesion characterization of diamond-like carbon films using scratch test technique

賴聖評(Sange-Ping Lay)

指導教授 ： 徐澤志

共同指導教授 ： 黃正熙(Chen-Hsi Huang)

元智大學/工程學院/機械工程學系/碩士(2007年)

https://doi.org/10.6838/YZU.2007.00069

摘要

本研究利用化學氣相沈積類鑽碳(CVD-DLC、CVD+ -DLC)、物理氣相沈積類鑽碳(PVD-DLC、PVD+ -DLC)共四種不同膜層被覆於碳化鎢基材上，針對類鑽碳膜層與基材之間的附著性做探討及研究。本文利用刮痕測試法（scratch adhesion test），配合聲波放射信號與光學顯微鏡(OM)、掃描式電子顯微鏡(SEM)定義臨界荷重(critical load)來決定附著性的好壞，並觀察刮痕軌跡的破壞型式，最後配合有限元素分析(ANSYS)模擬刮痕試驗與實驗結果做比對，進一步得知當膜層正要脫離基材時，所需要的臨界剪應力，為日後在做刀具模擬分析時的參數設計。

關鍵字

類鑽碳膜層；刮痕試驗；附著性；有限元素分析

並列摘要

In order to characterize the adhesion of Diamond-like carbon (DLC) coatings on Tungsten Carbide (WC) substrate, the scratch test was used. The scratch test is the most popular method of measuring adhesion. It was performed on a unit equipped with sensors of normal and tangential force, and acoustic emission (AE) signals. The failure occurs during scratch testing was examined by an optical microscope (OM) and a scanning electron microscope (SEM), if this failure event represents coating detachment than which is called the critical load.
In this paper, we used the finite element method to simulate the scratch process. The distributions of the stress field in the coating, and at the interface of the coating/substrate system were investigated. The results of the finite element can be used to simulate bonding strength of coating tool.

並列關鍵字

DLC coating；scratch test；bonding；finite element analysis

參考文獻

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