中間層與表面性質對類鑽碳薄膜機械性質影響之研究

The Effects of the Intermediate Layer and Surface Roughness on the Mechanical Properties of Diamond Like Carbon Films

顏瑞盈(Jui-Ying Yen)

指導教授 ： 魏哲弘

大同大學/工程學院/機械工程學系所/碩士(2005年)

摘要

本研究以電漿輔助化學氣相沉積(PECVD)方式，利用甲烷(CH4)反應產生類鑽碳膜(DLC)，鍍在矽晶圓、康寧1737玻璃及Kyocera公司A493陶瓷研磨基板 (三氧化二鋁)等三種材料，添加不同厚度的鈦、鉻等中間層，研究在同一底材下，中間層對DLC薄膜附著程度；並藉由蝕刻矽晶圓，探討表面粗糙度對DLC薄膜沉積的影響。以上實驗藉由奈米壓痕、拉曼光譜等物性量測，了解薄膜/中間層/底材的彈性係數、硬度、sp3/sp2鍵結比等因素對於附著情況的影響。
結果顯示當DLC薄膜厚度較薄(200nm)時，以玻璃及矽為底材、鉻為中間層，DLC薄膜附著狀況有改善的現象；然而隨著DLC薄膜厚度增加，不論以鉻或鈦當中間層，DLC薄膜附著效果都隨著厚度增加而變差。在同一塊試片上，當薄膜沉積過程產生不均勻情況時，sp2鍵結含量的比例增加時，縐褶與脫落情況變的越嚴重。使用經蝕刻處理後不同表面粗糙度之矽晶圓作為底材，沉積出來的DLC薄膜經拉曼光譜分析結果顯示表面鍵結情況幾乎相同，此結果顯示以矽為基材時，粗糙度對於DLC鍍膜品質的影響不大。

關鍵字

粗糙度 ； 類鑽碳膜 ； 附著程度 ； 中間層

並列摘要

This thesis utilized plasma enhanced chemical vapor deposition (PECVD) to produce DLC by methane (CH4) on three different substrates, silicon wafer, Corning 1737 glass, and Kyocera A493 ceramic with two different thicknesses of titanium and chromium as the intermediate layers. The adhesion of DLC films on different intermediate layers and the roughness effect on different silicon substrate without intermediate layer was studied by Raman spectroscopy and nanoindentation.
The results showed that when the thickness of DLC thin film was thinner (200nm), the DLC thin film adhesion showed an improving phenomenon with glass as the substrate and chromium as an intermediate layer; however, as the thickness of DLC thin film increased, the effect of the DLC thin film adhesion got worse, irrespective of the intermediate layer was chromium or titanium. On the same specimen, as the thin film deposition process showed some non-uniformity, as the ratio of sp3/sp2 bond increased, the wrinkling and peeling situations got worse. As for the adhesion for etched silicon wafers with different surface roughness, The DLC thin film depositions were analyzed by Raman spectroscopy and the results showed that the surface bonding was almost the same. This finding showed that the roughness didn’t have much impact on the quality of film of DLC on silicon substrate.

並列關鍵字

Adhesion ； DLC ； Intermediate layer ； Roughness

參考文獻

3. Z. Ring and T.D. Mantei, Journal of Vacuum Science and Technology A, 13 (1995) 1617.

4. C.R. Eddy, Jr., D.L. Youchison and B.D. Sartwell, Diamond and Related Materials, 3 (1993) 105.

7. D.R. Tallant, J.E. Parmeter, M.P. Siegal and R.L. Sompson, Diamond and Related Materials, 4 (1995) 191.

8. A. Grill, Diamond and Related Material, 8 (1999) 428.

10. C.T. Lin, F. Li and T.D. Mantel, Journal of Vacuum Science Technology A, 17(3) (1979) 735.