中間層與基材對類鑽碳薄膜機械性質影響

Effects of Interlayer and Substrate on the Mechanical Properties of Diamond Like Carbon Film

王怡舜(Yi-Shun Wang)

指導教授 ： 魏哲弘

大同大學/工程學院/機械工程學系所/碩士(2008年)

摘要

本研究探討以電漿輔助化學氣相沉積(PECVD)方式，使用甲烷(CH4)為源氣
體反應產生類鑽碳(Diamond like-carbon)薄膜在基材(substance) p-型(100)矽晶
圓、康寧1737 玻璃及不鏽鋼SUS-304NL 等三種材料，及加上鉻、鋁兩種金屬薄
膜，20、40 nm 不同厚度中間層(interlayer)時，中間層(interlayer)或基材(substance)
對類鑽碳(DLC)膜的附著程度與機械性質之影響。其中利用有限元素軟體
ABAQUS 計算熱應力分佈、光學顯微鏡、拉曼光譜、二次離子質譜儀和水滴試
驗等方法，了解中間層(interlayer)及基材(substance)效應對熱應力分佈、ID/IG 比
值、中間層氧化物及含氫量等因素之影響。
類鑽碳(DLC)薄膜，在矽基材(substance)上的附著效果都隨著以鉻、鋁中間
層的厚度增加而變差。相反的，不鏽鋼作為基材系統時，鉻、鋁中間層厚度增加
會造成附著情況有大幅度的改善。因為基材(substance)與薄膜的熱膨脹性比較匹
配，添加了中間層(interlayer)則對於附著情況及機械性質有反效果；對於在不鏽
鋼為基材(substance)時，因為熱膨脹性不匹配性，則需要添加中間層(interlayer)
作為兩者之間的緩衝層。在玻璃作為基材系統時，薄膜在鉻中間層的附著狀況會
隨著中間層厚度增加有改善現象，在鋁中間層而有相反的效果。玻璃與薄膜也是
因兩者的熱膨脹不匹配性，而造成薄膜有皺褶及剝落現象。

關鍵字

基材 ； 中間層 ； 類鑽碳 ； 熱膨脹性

並列摘要

Diamond like carbon (DLC) was deposited on p-type (100) silicon, Corning
1737 glass and SUS-304NL steel substrates for two different metal interlayer
chromium and aluminum. The film thickness is 200 nm and the interlayer film
thickness is 20 and 40 nm. The substrate, interlayer and interlayer thickness effects
were investigated by finite element simulation, OM inspection, Raman spectra,
SIMMS and contact angle.
The results show that the thermal stress resulted from the coefficient of thermal
expansion mismatch between the DLC and the substrate is critical for adhesion
strength, microstructure and hydrogen content. For high thermal stress like DLC on
steel, the addition of interlayer will improve the adhesion through the reduction of
thermal stress. On the other hand, the less mismatch system such as DLC on Si, the
metal interlayer is unnecessary. The microstructure and the hydrogen content in each
system is different which implies the substrate and the interlayer effect will influence
the content and mechanical property of the thin film.

並列關鍵字

CTE ； substrate ； interlayer ； DLC

參考文獻

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