This study demonstrated a manufacturing technology of the precision hybrid rapid tooling for manufacturing the diffractive optical element (DOE). The transcription rate in the rapid tooling manufacturing process is about 92.5%. The transcription rate in the embossed part is about 95.1% in the micro hot embossing molding. Precision hybrid rapid tooling technology not only reduces the fabrication cost of rapid tooling but also has higher mold strength. In comparison with conventional method for fabricating a pair of rapid tooling of a new DOE, a cost reduction of 60.4% can be achieved using a hybrid rapid tooling technology.