Design and Fabrication of A Multi-degree-of-freedom Microactuator using Symmetric Piezoelectric Pusher Element and its Applications

沈聖智(S. C. Shen) ； 黃俊誠(J. C. Huang) ； 蔡品群(P. C. Tsai) ； 黃信榮(H. J. Huang)

《微系統暨奈米科技協會會刊》 27期 (2012/06) Pp. 38-48

https://doi.org/10.30051/WXTJNMKJXHHK.201206.0006

並列摘要

A novel multi-degree-of-freedom (MDOF) microactuator was developed using a symmetric piezoelectric plate and a Ni-Co alloy micro-pusher element. A L1GA-like technique was employed to manufacture a Ni-Co alloy micro-pusher with a Vickers hardness value (HV) of 550, which was then attached at the midpoint of the long side of a piezoelectric plate with dual electrodes to construct a symmetric piezoelectric pusher element (SPPE). The research integrated the concept of LEGO® bricks , and three different vibrat ion modes of the SPPE were designed to develop a high-power MDOF motion platform , which was able to rotate a spherical device along three perpendicular axes. This MDOF microactuato r consisted of a stator and a rotor: the stator was created from two mutually orthogonal sets of parallel SPPEs to form a MDOF motion platform, and the rotor was a spherical device . The experiment demonstrated the high-power MDOF eyeball-like microactuator working frequencies along the X.,Y. , and Z-axes to be 223.4 kHz, 223.2 kHz, and 225 kHz and the rotation speeds to reach 50 rpm, 52 rpm, and 180 rpm, respectively , at a driving voltage of 30Vpp. In the future, this MODF eyeball-like microactuator may be used for a number of applications, such as sun-tracking systems for green energy harvesters and eyeball -like devices for use in the biomedical field.

並列關鍵字

Piezoelectric actuator ； Sun-tracking system ； MEMS ； Multi-degree-of-freedom motion