By virtue of several modem techniques including Microelectromechanical system_(MEMS)、electrophoretic separation and bioanalysis, the electrophoretic microchip enables the integrated processing of minute amounts of samples on a microdevice. In this report, we describe the fabrication methods of the electrophoretic microchips on different substrates including quartz and glass as well as hard and soft polymer. The characteristics of microchips on different substrates and their potential applications are also discussed.