雷射振鏡馬達振動分析及除振技術之研究

Research on Inertial-Sensing-Based Vibration Analysis and Suppression System for Laser Galvanometers

周柏寰 ； 許煜亮 ； 張興政 ； 楊士進 ； 陳昱態 ； 朱玉鳳

《機械工業雜誌》 410期 (2017/05) Pp. 66-80

摘要

本研究旨在開發一套基於慣性感測技術之雷射振鏡馬達振動分析與除振系統並應用於抑制雷射振鏡馬達的扭力共振頻率。我們將針對本研究所需相關硬韌體實現、演算法理論及實際應用之開發與設計，完成下列工作項目：(1)開發一套具輕重量、小體積、低功耗、低成本與高可靠度之振動訊號感測模組；(2)開發高效能之振動分析與除振演算法；(3)建構高效能之梳狀濾波器。最後，本研究將整合所研發之振動訊號感測模組、振動分析與除振演算法及梳狀濾波器為一振鏡馬達振動分析及除振系統平台，來加以抑制雷射振鏡馬達的振動問題，進而改善雷射振鏡系統的精準度及穩定度。

關鍵字

振鏡馬達 ； 慣性感測技術 ； 振動分析 ； 振動抑制 ； 梳狀濾波器

並列摘要

The objective of this study is to develop an inertial-sensing-based vibration analysis and suppression system for laser galvanometers. The system is designed to measure and analyze the vibrations during rotation motions of galvanometers. Comb filter is designed to effectively restrain the vibrations of the galvanometers. In order to accomplish the objectives, we firstly develop a light, small size, low power, low cost, and reliable inertial-sensing-based measurement module to measure the vibration signals of the galvanometers. Secondly, an efficient and robust vibration analysis and suppression algorithm is developed to deduce the resonance frequency of the galvanometers. Finally, an efficient comb filter is developed to restrain the vibrations of the galvanometers. The vibration measurement module, vibration analysis, suppression algorithm and comb filter are integrated in a platform to restrain the vibrations of the galvanometers, and improve the accuracy and stability of the laser galvanometer scanning systems.

並列關鍵字

Galvanometer ； Inertial Sensing Technology ； Vibration Analysis ； Vibration Suppression ； Comb Filter