雷射振鏡掃描馬達之高頻振動抑制電路研究

本文的主旨在於使用陷波濾波器（Notch Filter）來抑制雷射振鏡馬達（Galvanometer Motor）擺動時扭力共振頻率（Torsional resonance frequency）所產生的振動與噪音。對於建立扭力共振頻率的數學模型是複雜且困難，一般學術上並未針對此問題做詳細分析，因此本研究使用頻率響應分析儀，量測出雷射振鏡馬達共振頻率，建立振鏡馬達扭力共振頻率頻譜圖，進而設計出抑制共振頻率的陷波濾波器電路。並利用數學式，計算出最佳電路參數，且利用軟體OrCad PSpice與Matlab進行模擬驗証電路參數，交叉佐證參數是否最佳化。並製作出實體陷波濾波器，透過頻率響應分析儀來驗證所設計出的陷波濾波器是否與Matlab相符合，最後將實體電路加入振鏡馬達驅動器回路內，驗證所設計出的陷波濾波器能有效抑制振動與噪音。

關鍵字

陷波濾波器；雷射振鏡馬達；扭力共振頻率頻率響應分析儀；最佳化

並列摘要

This paper proposes a notch filter circuit to suppress the high frequency resonances of galvanometer motor which will induce the vibration and noise. Firstly, the dynamic model including the torsional resonances for the galvanometer motor is identified by the spectrum analyzer through the well-designed experiment. Then, a two levels cascade notch filters is designed to suppress the 1st and 2nd torsional resonances based on the identified results. The specifications of filtering frequencies and attenuated depth can be easily adjusted by the variable resistors. Finally, the experimental results illustrate the proposed cascade notch filter can dramatically suppress the magnitude of torsional resonances of galvanometer motor when it is running.

並列關鍵字

Notch filter ； Galvanometer motor ； Spectrum analyzer ； Torsional resonance

國際替代計量

雷射振鏡掃描馬達之高頻振動抑制電路研究

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