超高靈敏度雷射干涉儀之振動隔離系統

THE SEISMICS ISOLATION SYSTEM FOR ULTRA SENSITIVE INTERFEROMETER

尹樂道(Lei Daw Yin)

指導教授 ： 吳昌暉

元智大學/工程學院/機械工程學系/碩士(1994年)

摘要

雷射干涉儀的量測技術普遍被使用在高精密度的量測上為了提高量測精度
必須減低外界環境所帶來的雜訊，在諸多雜訊中尤以地表振動對量測值影
響最大，所以雷射干涉儀所能量測的精度，往往取決於對地表振動隔離的
能力。於量子電動力學雙折射性與軸粒子交互作用之實驗研究為了檢驗光
在真空強磁場環境下之雙折射特性，亦即要量測兩偏極光，在平行與垂直
磁場方向之間折射率的差異 以探索軸粒子的存在，必須建立超高靈敏干
涉儀光學系統以量測。為了因應此系統的需求，必須發展振動隔離系統以
達到次奈米級精度的定位控制，此即本文要探討的主題。本文將先介紹光
的雙折射特性及光學干涉儀的量測原理，進而說明振動隔離系統的架構，
此振動隔離系統採用雙擺式的機械架構，其機械的特性利於抑制高頻的振
動雜訊，至於低頻部分的振動，則須藉由迴授對光感測器的輸出所解調的
訊號,經由控制系統推動線圈（voice coil），來完成抑制地表振動的效
果。本文最後將針對電腦模擬的結果，預測振動隔離的效果。

關鍵字

振動隔離 ； 雷射干涉儀 ； 地表振動

並列摘要

The measure technology using laser interferometer has been all
over applied to highly sensitive measurement.In order to
correct the level of measurement we must subtract the noise
resulting from the environment.Generally ,the seismic noise
plays an important role among the noise of high sensitive
measurement.In the other words the level of highly sensitive
measure technology using laser interferometer mainly depend on
the performance of seismic isolation.It's necessary to built a
ultra-sensitive interferometer optician system to detect the
different index of refraction between two polarization of
vacuum under a strong magnetic filed in the Q&A experiment (a
test of the Quantum Electrodynamics prediction of light
retardation in the magnetic field and the search for scalar or
pseudoscalar particles with small masses that can couple to two
photons).An gravity wave reduction structure which make a pair
of mirrors in the Fabry-Perot cavity hold on the fixed length
(the t olerance must less than nanometer order) is requisite
for the optician system.So should we develop a structure which
can isolate seismic noise well in the experiment.At the first
,the paper will introduce the light retardation in the magnetic
filed and how does the laser interferometer work in Q&A
experiment,then the seismic Isolation structure will be
discussed Clearly at chapter .The seismic Isolation is mainly
combined by double pendulum machinery.The mechanical
characteristics have advantage to noise suppression for high
frequency,but is failed for low frequency.For the reason we
must design an active servo loop to subtract the seismic noise.
Finally,this paper will predict the seismic isolation effect by
the result of simulation made by computer program.

並列關鍵字

seismics isolation ； laser interferometer ； seismic