雷射量測與演算法於精密定位之應用

Laser Measurement and Algorithm for Precision Positioning of Feed Drives System

劉東昇 ； 洪揚 ； 陳世昌

《機械工業雜誌》 411期 (2017/06) Pp. 99-109

摘要

雷射干涉儀受到很多因素影響其精度。拜現今科技進步所賜，雷射干涉儀遇到之難題已得到很大的改善，現在已成為市面上可提供高精度與高解析度的儀器。工業各大領域在使用精密機械上要求精度越來越高，不論是工具機產業、面板產業、封裝製程等，例如因為關鍵尺寸需求勢必得開發大行程精密定位平台，由於大行程大跨距導致的累積誤差往往使定位過程達不到需求，在此引入雷射干涉儀配合傳統的光學尺使用抑制阿貝誤差。本文發展雙回饋量測補償技術，取得回授資訊並計算控制推力達到閉回授控制，藉由切換粗細定位達到高精密定位的需求。

關鍵字

雷射干涉儀 ； 雙回饋 ； 阿貝誤差

並列摘要

The accuracy of laser interferometers is affected by many factors. Thanks to today's technology progress, the problems encountered in laser interferometer have been greatly improved, and it became one of the instruments that offer the highest resolution and the highest precision in the market. The precision machinery used in various industrial fields requires higher and higher precision, including machine tool industry, panel industry, and encapsulation process, etc. For example, it is necessary to develop large range precise positioning platform because of the Critical Dimension requirement. Because the cumulative errors resulted from the large stroke and large span cannot meet the accuracy requirement in positioning process, introduction of laser interferometer with the traditional optical scalar to reduce Abbe error is one of the solutions. In this article, we introduce the development of double feedback measurement compensation technology, which obtain feedback information and calculate the control thrust for closed feedback control, by switching between the coarse and fine mode of the positioning to meet the high positioning accuracy requirement.

並列關鍵字

Interferometer ； Dual Feedback ； Abbe Error