雷射量測技術於工具機精度提昇之研究

The Research of Laser Metrology on the Accuracy Improvement of Machine Tools

黃梓楠(Zih-Nan Huang)

指導教授 ： 范光照

國立臺灣大學/工學院/機械工程學研究所/碩士(2013年)

https://doi.org/10.6342/NTU.2013.10267

摘要

線性運動平台在運動過程中會有六個自由度的誤差，受阿貝原理影響的角度誤差為體積誤差的主要來源。
本研究利用雷射及光學元件組合成多個精密量測系統，利用雷射及四象限感測器組成直線度量測系統，配合五角稜鏡，即可量測到兩導軌的平行度。接著利用自動視準儀原理組裝雙角度感測器，來量測到平台的俯仰度、偏擺度。藉由上述的量測儀器，在組裝機械時，盡可能地把誤差調整到最小，即可改善機器的精度。
另外，本研究利用自動視準儀以及液體保持水平的原理，組成雙軸水平儀。當水平儀有角度變化時，可同時量測兩個方向的角度變化，也可在量測平坦度時減短量測的時間。
利用雙角度感測器，加上兩支準直雷射及兩個四象限感測器，可量測滾動度，整合成一套可同時量測三角度(Pitch、Yaw、Roll)的感測器，配合自行設計的電路板，將角度誤差直接進入PC-based控制器，在控制器內建立體積誤差模型，省去通訊溝通的時間延遲，即時補償三角度誤差；而本研究將線性誤差以及垂直度誤差預先量測出來，未來可建立補償方程式在控制器內，即可補償體積誤差。

關鍵字

直線度 ； 水平儀 ； 體積誤差 ； 三角度感測器 ； 阿貝誤差

並列摘要

Linear moving stage has six degree-of-freedom errors during moving process. Due to the Abbe' principle, angular errors are the major source that influence the accuracy of NC machine tool.
This research adopts laser and optics to develop some measurement systems. In order to measure the parallelism of two linear guideways, this research designs a straightness measurement system with a laser, a quadrant photo detector (QPD) and a pentagon prism. With a two-angle measurement sensor based on autocollimator principle, it is capable of measuring pitch and yaw angles. Using the above sensor, we can adjust the guideways to reduce angular error so as to enhance the accuracy of machine while assembling.
With the autocollimator and the levelness of the liquid, we have designed a dual-axis electronic level. This level can measure the flatness of a surface plate and and adjust machine bed leveling quickly.
Roll sensor that measures the roll angular error is fabricated by two collimated lasers and two quadrant detectors. The three-angle sensor that can measure the angle error (Pitch、Yaw、Roll) simultaneously is composed of a roll sensor and a two-angle measurement sensor. Using the self-designed circuit and three-angle sensors, we can import angular errors into the PC-based controller. Volumetric error model were built in the controller to reduce communication time delay in order to compensate the volumetric errors immediately. The linear errors and squareness errors are also measured in this study. In the future, building the compensation equations into the NC controller will compensate the volumetric error in real-time.

並列關鍵字

straightness ； level ； volumetric error ； three angle sensor ； Abbeerror

參考文獻

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[4] Fan, K.C., Generalized Study of Volumetric Error Analysis for Machine Tools and CMMS, Part Two-Applications. J. of CSME, 1989. 10(2): p. 145-152.

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