面板廠降低空氣循環運轉阻力與廠務設施節能評估

本研究針對TFT-LCD之空調系統耗能進行資料收集與計算，評估可節省能源的空間，並提出降低主機系統耗能。根據過去收集的廠房運轉資料進行分析，除了製程機台占比45%之外，廠務系統耗電之中，壓縮乾燥空氣CDA為第一大的耗電設備占比22%，高溫冰水主機占比7%列居第二，FFU耗電占比6%為第三。在進行節能可行性評估時必須先進行運轉參數收集，進行設備運轉效率的評比，從中找尋節能的空間。根據初步的能耗分布與運轉數據分析結果發現，將負責潔淨室循環的風機濾網機組（FFU）目前使用的濾網傳統的玻璃纖維製高效濾網更換成PTFE濾網，經實際現場更換量測後，部分製程區域更換數量為200片，單台節省率40.66%；汰換MAU低壓損玻璃纖維濾網378片，單片節省率24.66%。

關鍵字

面板廠；節能；風扇過濾機組；外氣空調箱風機；濾網

並列摘要

This research collects data is calculated energy consumption of the TFT-LCD air-conditioning system to evaluate how much energy can be saved, and proposes to reduce the energy consumption of the chiller. Analysis based on the factory operation data collected in the past, except that the process machine accounts for 45%, in addition to the power consumption of the factory system, compressed dry air CDA accounted for 22% of the largest power consumption equipment, high temperature chiller accounted for 7% and ranks second, FFU power consumption accounted for 6%. third. When evaluating the feasibility of energy conservation, it is necessary to collect operating parameters and evaluate the operating efficiency of the equipment to find room for energy conservation. According to preliminary analysis of distribution and operation data, it is found that the current filter used in the fan filter frame (FFU) responsible for the clean room circulation is a traditional high-efficiency filter made of glass fiber. If the PTFE filter can be replaced, it will be replaced on site measurement. Partial process area, replacement quantity are 200 pieces, energy saving per unit is 40.66%; excluding replacement of 378 pieces of MAU low pressure drop Glass Fiber filter, energy saving per unit is 24.66%.

並列關鍵字

TFT-LCD Fab. ； Energy saving ； FFU ； MAU fan ； Filter

參考文獻

經濟部能源局，能源統計月報，2018，網址: https://www.moeaboe.gov.tw/ECW/populace/home/Home.aspx

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面板廠降低空氣循環運轉阻力與廠務設施節能評估

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