- 學位論文
面板廠空調與空壓機設備節能研究
Energy-saving study of the Air Condition and Air Compressor equipments for TFT-LCD factory
摘要
在面板產業廠務系統中，冰水系統（占全廠用電約14%）與壓縮乾燥空氣系統（占全廠用電約19%）二項設備的能源消耗最高。本文透過改善生產工業流程常用的Six Sigma（六標準差）方法，通過量測、分析、改善、控制及配合使用Minitab統計分析軟體，探討廠務系統各項節能方式改善前後效益。以國內某5代廠的TFT-LCD+CF為例，壓縮乾燥空氣系統（Compressed Dry Air, CDA）在空氣條件為1atm@25℃，經過CDA露點溫度提升 -70℃提升至-20℃（無熱式乾燥機），單位耗電由原本147 W/m3降低為132 W/m3，節能效益 7.3%；與新增加熱式乾燥機的改善，每日減少 29,743 kW的CDA耗能，節能效益 20.8%。冰水系統方面，在外氣焓值條件為66 KJ/kg下經過二因子二水準的DOE實驗設計（冷卻水進水溫度26℃和冰水供水溫度8.5℃、冷卻水進水溫度26℃和冰機冷卻水溫度差5.8℃），會有較低的總體耗電量與單位耗能。在2010年至2012年間，經過CDA系統設備改善、冰水系統找出最佳的系統操作參數及各設備機台節能推動，實測出面板的生產單位耗能逐年降低，由2010年183 kW/m2 → 2011年 171 kW/m2→ 2012年 147 kW/m2，降幅 19.6%。
並列摘要
Among the facility systems of panel industry, the chiller system (accounting for about 14% of plant power consumption) and the compressed dry air (CDA) system (accounting for about 19% of plant power consumption) have the maximum energy consumption. This study attempted to improve the Six Sigma for industrial process, and discussed the benefits before and after the energy saving improvement measures through Measure, Analyze, Improve, and Control, as well as the use of Minitab software. Using the TFT-LCD+CF of a fifth generation plant in Taiwan as an example, the dew-point temperature of CDA system increased from -70℃ to -20℃ (heatless dryer), the unit power consumption decreased from 147 W/m3 to 132 W/m3, and the energy-saving benefit was 7.3%. After the improvement by additional thermal dryer, the daily CDA energy consumption was reduced by 29,743 kW, the energy-saving benefit was 20.8%. For the chiller system, through the two-factor two-level DOE experiment design (1st : chiller’s cooling water temperature is 26℃ and supply chiller water temperature is 8.5℃ ; 2nd : chiller’s cooling water temperature is 26℃ and chiller’s cooling water temperature is 5.8℃), the total power consumption and unit energy consumption were lower. From 2010 to 2012, the CDA system facility was improved, the optimum system operating parameters were found for the chiller system, and the energy saving of various equipment machines was promoted. The measured unit energy consumption of the production of panels decreased year by year, 183 kW/m2 in 2010 → 171 kW/m2 in 2011 → 147 kW/m2 in 2012, which is a decrease by 19.6%.