半導體廠潔淨室氣流模擬分析與省能運轉策略

Airflow Simulation of Semiconductor Clean Room and Energy Saving Operation Strategy

黃佳松(Chia-sung Huang)

指導教授 ： 簡良翰 ； 蔡尤溪

國立臺北科技大學/機電學院/冷凍空調工程系所/碩士(2006年)

https://doi.org/10.6841/NTUT.2006.00411

摘要

本研究利用計算流體力學分析軟體，以Class 100之無塵室實際尺寸（28.8 m 長 x 48 m 寬 x 21 m 高），將現場配置之盤管、風車、濾網之壓損特性曲線建置於計算模型，並輸入實際之風量、壓力等邊界條件，模擬整個循環系統所經過各元件之流場與壓力分佈；並與現場之壓力等實際數據進行比對。藉此尋求出最佳的空氣平衡系統曲線；然後再探討外氣空調箱系統(MAU)送風量、製程排氣系統、風車濾網組(FFU)運轉與潔淨室壓力變化之影響，以設計出最具節能及低成本之系統，並提供使用者良好的操作策略。本研究之案例顯示，每增加外氣進氣量壓力1 Pa，則潔淨室壓力增加0.25 Pa；而FFU轉速每增加 7 rpm，則潔淨室壓力增加0.5 Pa，且循環次數增加一次。另一方面，MAU進口壓力每增加約2 Pa，或增加FFU 轉速27 rpm ，則FFU維修層壓力增加1 Pa。

關鍵字

潔淨室 ； 氣流模擬分析 ； 外氣空調箱 ； 潔淨室壓力 ； 節約能源

並列摘要

In the present study, air flow fields and pressure distributions of a full scale class 100 semiconductor clean room system were simulated using a computational fluid dynamics (CFD) model that incorporates flow resistances of various components in the air path. The fan-performance curves of fan filter unit (FFU), the pressure – velocity curves of the dry coil and the ULPA are included in the model. The pressure and velocity distributions of the present simulation are in reasonable agreement with the measurement in a clean room system during operation. Various MAU pressures and FFU fan speeds were simulated to investigate their effects on the clean room pressure and velocity distribution. The simulation results were interpreted from the energy conservation view point, and the optimum operation patterns were proposed. The results of the present study indicate that the clean room pressure increases 0.25 Pa for every increment of 1 Pa MAU pressure or 7 rpm FFU fan speed. The pressure in the maintainance space above FFU increases 1 Pa for every 2 Pa increment of MAU pressure or 27 rpm increment of FFU fan speed.

並列關鍵字

Make Up Air Handling Unit ； Air Flow Modeling ； Clean Room Pressure ； Energy Saving

參考文獻

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