潔淨室機台隔間開口對排煙效果與潔淨度之影響

The Influence of Smoke Ventilation and Cleaniness for An Opening of An Isolated Machine Room Inside A Clean Room

張景閎(Ching-Hung Chang)

指導教授 ： 簡良翰

國立臺北科技大學/機電學院/能源與冷凍空調工程系碩士班/碩士(2007年)

https://doi.org/10.6841/NTUT.2007.00292

摘要

本研究探討潔淨室排煙防護區之內層隔間排煙情況。在一座電子廠的潔淨室內因為配合機台之運作而更改室內隔間，形成排煙防護區內又有一層隔間，因而破壞了原有的防護區劃。為了維持既設排煙防護區劃的排煙功能，在新隔間牆上方須作適當開口以符合消防法令所要求的人員機台防護。但此隔間開口是否能達到排煙之功能卻是未經證實的，因此 本研究中以商用套裝軟體AirPak的k –ε two-equation 亂流模式為基礎，建立具備適當格點、參數與邊界條件的數值模型，作分析此一機台隔間開口處之氣流流場、壓力場分佈之工具，並以一小型案例作實驗量測，確認電腦數值模擬結果與實測值一致。再以此數值模型進行全尺寸模擬，作機台隔間開口對排煙效果影響的研究。
在縮小模型及全尺寸案例的數值模擬一致結果是：唯有當隔間內壓力大於隔間外的壓力，才能確保將隔間內氣流往外送。全尺寸模擬結果得知：即使隔間牆的開口大小符合消防法規的要求：開口面積達樓地板面積的百分之二，未必能達到排煙之實際效果。為提高隔間內的室壓且考慮室內氣流的穩定，所以必須增加隔間內FFU(Fan Filter Unit)的數量而非轉速，以使得隔間內壓力大於隔間外之壓力。增加的數量多寡可由數值模擬先行預測，由預測的結果再行決定施作的方向。以本研究對61.5m (長) × 20.4m (寬) × 14.5m (高)之潔淨室全尺寸為例，新增設之隔間31.5m (長) × 12m (寬) × 4m (高) 的數值模擬中。將高架地板覆蓋率維持在7.05%，則FFU之覆蓋率需達25.05%以上，才能將氣體往隔間外送；若FFU覆蓋率僅10.96%，則無論開口位置是緊鄰天花板或在牆面中間，即使隔間開口已達11.90%仍無法達到排氣之目的。

關鍵字

潔淨室 ； 數值模擬 ； 計算流體力學 ； CFD ； 外氣空調箱 ； MAU ； FFU ； HEPA

並列摘要

This study investigates the ventilation of an isolated room inside a smoke control zone in a clean room. For the needs of the operation of certain machines, an isolated room is built inside a clean room and results in destruction of the original smoke control zone. For the purpose of satisfying the fire safety regulations, an opening is needed on the wall of the inner isolated room. However, it has never been proved that whether the opening can actually ventilate the smoke out of the isolated room for a clean room. The flow of this situation is simulated by a commercial computational fluid dynamic code to simulate the flow in the present study. A small isolated room is built and tested to simulate the actual situation. A simulation model is developed by simulating this small room using varies mesh sizes and parameters. This model is verified by comparing the velocity distribution with the measured values. Then, the verified model is applied on various opening size, location and the numbers of fan filter units for a full scale isolated room inside a clean room.
All simulations show that the smoke can flow out of the isolated room only if that the pressure inside the isolated room is greater than that outside the room. The full scale simulations show that the opening, which satisfies the fire safety regulation, does not necessarily vent the air out of the isolated room. For increasing the pressure in the isolated room without disturbing the flow in the room, one needs to increase the number of FFU instead of its rotating speed. For the 61.5m × 20.4m × 14.5m full-scale clean room in the present work, the FFU needs to be greater than 25.05% of the ceiling to ensure air venting outside the isolated room. If the FFU occupied 10.96% of the ceiling, air will flow into the isolated room through the opening, even if the opening is as big as 11.9% of the wall.

並列關鍵字

CLEANROOM ； CFD ； MAU ； FFU ； HEPA

參考文獻

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