壓電式微加工超聲波傳感器於不鏽鋼基板之開發

The Development of Piezoelectric Micromachined Ultrasound Transducer on Stainless-steel Substrate

楊育衡(Yu-Heng Yang)

指導教授 ： 吳文中

國立臺灣大學/工學院/工程科學及海洋工程學研究所/碩士(2019年)

https://doi.org/10.6342/NTU201904180

摘要

鑒於消費性電子產品於全球蓬勃發展，各大行動通訊廠商為提供使用者更佳之體驗效果，因此，紛紛投入3D感測系統之開發，尤其是應用於行動裝置上。在娛樂消費性產品的範疇內，擴增實境(Augmented Reality, AR)及虛擬實境(Virtual Reality, VR)兩者也需3D感測技術之系統，由於當前使用之架構為手持感測握把進行動作偵測及透過握把上之按鈕進行遊戲操作，以致有可能降低使用者之遊戲沈浸度。倘若能研發出取代手持握把之3D感測系統，便得以提升此方面之發展性。除此之外，此項技術亦能應用於空間中距離偵測、工業與教育等其他領域上。
本研究以空間中距離偵測為目標，設計出毫米尺度之兩種不同結構壓電式微加工超聲波傳感器，且沿用本奈米生醫微機電實驗室過去開發應用於微壓電能量擷取元件的高品質壓電厚膜金屬微機電(Metal-MEMS)技術之經驗，以氣膠沈積製程製作出不鏽鋼為基材之fully-clamped結構與flexurally-suspended結構之超聲波傳感器元件，並探究兩結構下之輸出表現。
經過測量，製作出之fully-clamped結構與flexurally-suspended結構元件，兩者的共振頻率分別為56.45 kHz以及57.8 kHz，並在接收與發射實驗結果中發現，具有相似共振頻的此兩種不同結構下，fully-clamped結構於接收以及發射的性能輸出表現上皆優於flexurally-suspended結構。

關鍵字

微機電製程 ； 壓電式微加工超聲波傳感器 ； 壓電材料 ； 壓電薄膜製程 ； 氣膠沉積法

並列摘要

Due to the rapid development of consumer electronics products in the world, many telecom companies invested in the development of 3D sensing system, especially for the mobile devices, in order to provide the better experience for the users. Among the entertainment consumer products, the augmented reality and virtual reality also require the 3D sensing system. Now we use the handheld move motion controllers for motion detection and playing the game, as a result, it may reduce the game immersion of the users. If we can provide a better 3D sensing system to replace the handheld motion controllers, then the possibility of this technology can be more diversified. For example, it can be used in other fields such as space detection, industry and education.
In this study, the objective is to design the piezoelectric micro-machined ultrasound transducer(p-MUT) with two different structures which dimensions of millimeter scale for in-air range finding. We used the metal-MEMS technology for fabricating the high quality thick-film micro piezoelectric energy harvester, which is developed by nano-Bio MEMS laboratory. The stainless steel-based fully-clamped and flexurally-suspended structure p-MUTs are fabricated by aerosol deposition method. The output performance of the p-MUTs devices are discussed.
The resonant frequency of the fully-clamped p-MUT and the flexurally-suspended p-MUT are 56.45 kHz and 57.8 kHz, respectively. The acoustic experimental result shows that these two p-MUTs have the similar resonant frequency within different structure, the fully-clamped p-MUT has better performance than flexurally-suspended p-MUT, no matter it is used as a transmitter or receiver.

並列關鍵字

MEMS ； piezoelectric micro-machined ultrasound transducer ； piezoelectric material ； fabrication of piezoelectric film ； aerosol deposition method

參考文獻

[1] L. Li, "Time-of-light camera–an introduction," Technical white paper, no. SLOA190B, 2014.

[2] R. Vassallo, A. Rankin, E. C. Chen, and T. M. Peters, "Hologram stability evaluation for Microsoft HoloLens," in Medical Imaging 2017: Image Perception, Observer Performance, and Technology Assessment, vol. 10136, p. 1013614, 2017

[3] O. Oralkan et al., "Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 49, no. 11, pp. 1596-1610, 2002.

[4] F. Sammoura, K. Smyth, and S.-G. Kim, "Optimizing the electrode size of circular bimorph plates with different boundary conditions for maximum deflection of piezoelectric micromachined ultrasonic transducers," Ultrasonics, vol. 53, no. 2, pp. 328-334, 2013.

[5] G. G. Yaralioglu, A. S. Ergun, B. Bayram, E. Haeggstrom, and B. T. Khuri-Yakub, "Calculation and measurement of electromechanical coupling coefficient of capacitive micromachined ultrasonic transducers," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 50, no. 4, pp. 449-456, 2003.