單邊擺動壓電式無閥薄膜泵之效能分析

Design and Development of a Valveless One-side Actuating Micropump

黃致崴(Chih-Wei Huang)

指導教授 ： 馬小康

國立臺灣大學/工學院/機械工程學研究所/碩士(2009年)

https://doi.org/10.6342/NTU.2009.00165

摘要

在本研究中，設計並開發出單邊擺動壓電式無閥薄膜泵，並進行致動原因之驗證實驗。主腔室使用尺寸為45 mm × 28 mm × 4 mm，配合副腔室尺寸為7 mm × 20 mm × 4 mm進行實驗。由實驗發現能使無閥泵致動的原因，是因為副腔室上方的薄膜因應壓電片擺動作被動反向之振動，在工作過程中，有類似閥體的功能，能中斷部分工作流體流回主腔室，使其產生單一方向之流動。而實驗也證實副腔室上的薄膜，為流向控制元件，而非放大元件。另外，由實驗結果指出無閥薄膜泵的效能會受操作頻率、操作電壓、薄膜厚度及主腔室的尺寸等因素的影響。在主腔室使用0.5 mm厚度之薄膜副腔使用0.3 mm厚度之薄膜時有較佳之揚程效能，平均揚程為1522.5 Pa。而在主腔室長43 mm時有較佳之流量效能，180 Hz時，平均流量達到1.128 mL/s。阻尼實驗中，可以發現流量與最大流量產生的頻率隨阻尼增加而變小。加入漸縮漸擴元件於主腔室入口端，也有助於改善無閥薄膜泵之效能。

關鍵字

單邊擺動 ； 壓電 ； 流向元件 ； 微泵 ； PDMS ； 無閥

並列摘要

In this study, a newly designed micropump, valveless one-side actuating piezoelectric micropump, has been successfully developed to actuate liquid in one direction. The micropump consisting of a primary chamber and a secondary chamber is fabricated in an aluminum case by using highly accurate CNC machine. The dimensions of the primary chamber and secondary chamber are 45 mm × 28 mm × 4 mm and 7 mm × 20 mm × 4 mm, respectively. The actuator of the micropump is fixed on the top of primary chamber with a PDMS diaphragm at one side of the pump case. To earn a net flow rate, the secondary chamber covered by a PDMS diaphragm can vibrate as a valve for controlling the flow direction in the outlet. Also, a well known flow-direction device, nozzle/diffuser, is designed to enhance the pump flow rate in the inlet. The experimental results indicate that the performance of the micropump is dominated by the actuating frequency and voltage of the piezoelectric device, the thickness of the PDMS diaphragm, and the dimensions of the primary chamber. The maximum flow rate of the valveless micropump is 1.128 mL/s at 180 Hz with a 43-mm-length primary chamber; while the maximum pump head can reach 1522.5 Pa by using a 0.5-mm-thickness and a 0.3-mm-thickness diaphragm on the primary chamber and the secondary chamber. In addition, under damping effect is observed in the primary chamber, when the chamber height is reduced from 4 mm to 1 mm.

並列關鍵字

One-side actuation ； Piezoelectric device ； Flow-direction device ； Valveless micropump ； PDMS

參考文獻

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