薄型單邊擺動壓電式無閥薄膜泵性能分析

Performance of Thin Valveless One-side Actuating Diaphragm Micropump

李易翰(I-Han Li)

指導教授 ： 馬小康

國立臺灣大學/工學院/機械工程學研究所/碩士(2010年)

https://doi.org/10.6342/NTU.2010.02268

摘要

本研究設計腔室、中間通道、出入口圓管組合成腔體，搭配實驗室研究團隊所設計的單邊擺動式壓電片為致動器，與薄膜結合成新式的無閥薄膜泵。在薄膜泵運作時，中間通道將上方覆蓋的薄膜分成受壓電片直接作用力的主動區和受流體流動影響的被動區。實驗方向為逐步式的提升薄膜泵的性能，先利用單邊擺動的特性設計入口端位置，得到一定性能的薄膜泵，接著從產生流量的因素著手，確認薄膜泵被動薄膜區的振動對性能有影響，拿此特性放大被動薄膜區面積。之後改變中間通道寬度減少流體在腔體流動時的阻礙，使薄膜泵的性能得到提升。再由改變壓電片固定端位置，確認被動薄膜區薄膜為流向控制元件和流量放大元件，由模擬去看被動薄膜區薄膜每一節點的振動現象，推測只要能減少整體薄膜膨脹位移較大處的個數和降低薄膜與出口端的距離，能更有效提升薄膜泵的性能，以實驗對被動薄膜區加入墊片的方式來驗證，最後當使用高度0.3 mm、面積大小10 x 10 mm2的墊片放置在被動薄膜區之腔室時，將薄膜膨脹位移較大處靠近出口端和減少薄膜與出口端的距離，在70 Hz下能得到平均最大流量101.5 ml/min，揚程高度21.3 cm的性能和大範圍的流量對頻率分布。

關鍵字

單邊擺動 ； 薄膜泵 ； 壓電效應 ； 無閥 ； 流向控制元件 ； PDMS

並列摘要

A novel designed of valveless diaphragm micropump is consisted of chamber, the middle passage, import and export of pipe. By using one-side piezoelectric (PZT) as actuating device, the diaphragm by middle passage will be divided into the active area by direct force from PZT and the passive area affected by the fluid flow. Experimental direction is the gradual enhancement of micropump performance. First, in the light of characteristics of one-side actuating design entrance location and find the reason of flow rate generation. We know that the vibration of diaphragm in passive area is an important role in order to improve the performance of micropump. Take this feature to enlarge the passive area of diaphragm. Later, middle passage width is reduced for micropump flow resistance. Then change the location of PZT fixed end, to confirm the passive area of diaphragm as flow control and flow amplification components. In simulation to see the vibration phenomenon of each node in passive area of diaphragm obtain two key points to achieve high performance in micropump. One is to reduce the distance from diaphragm to the exit, the other is to reduce the number of more large displacement position of the whole diaphragm. Therefore, using high of 0.3 mm, 10 x 10 mm2 size shim placed in the chamber of passive area of diaphragm for verify the simulation. We would get under the 70 Hz the maximum average flow rate 101.5 ml/min, pressure head height 21.3 cm of performance and a wide range of flow rate on the frequency distribution.

並列關鍵字

One-side actuation ； Diaphragm micropump ； Piezoelectric effect ； valveless ； Flow control components

參考文獻

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