單邊擺動壓電式薄膜泵之設計與效能分析

Design and Performance of a One-side Actuating Diaphragm Micropump

林政瑤(Cheng-Yao Lin)

指導教授 ： 馬小康 博士

國立臺灣大學/工學院/機械工程學研究所/碩士(2008年)

https://doi.org/10.6342/NTU.2008.01038

摘要

本研究係依過去實驗室研發的壓電式薄膜泵進行改良，並釐清薄膜泵與其零組件、閥體以及腔體本身之間的關係。壓電式薄膜泵具備輕薄特性，腔體內部尺寸為45 mm × 28 mm × 4 mm，利用壓電片改變薄膜形狀以驅動流體，並使用閥體控制流體方向。壓電式薄膜泵的輸入電壓為±50 V，操作頻率在50 Hz 到170 Hz 之間，透過閥體改良可將薄膜泵流量由1.20 ml/s 提升至2.67 ml/s，而後藉由改變薄膜泵腔體設計，流量可增加為4.40 ml/s，最大可承受背壓為8.33 kPa，達到業界應用於電子散熱系統需求。壓電式薄膜泵可連接冷卻水套成循環散熱系統或開放散熱系統，當發熱源為30 W，循環系統以及開放系統的熱阻分別為0.45 °C/W 以及0.27 °C/W。

關鍵字

薄膜泵 ； 微型泵 ； 壓電 ； 逆止閥 ； 水冷散熱系統

並列摘要

The performance of a one-side actuating diaphragm micropump based on the previous study has been improved. Being compact structured, the micropump drives liquid by a piezoelectric device, which consumes less energy than traditional motors. The input sinusoidal signal to the driving device is ±50 V ranged from 50 Hz to 170 Hz. The correlation among the components of the pump is studied. Through the study of the check valves, the improved flow rate rises from 1.20 ml/s to 2.67 ml/s. The best performance on a newly designed pump chamber is 4.40 ml/s with a maximum pump head of 8.33 kPa. It is capable of circulating liquid in a closed loop and is tested in a heat dissipation system. The result shows the thermal resistances of the cold plate on a 30 W dummy heater in the open system and the circulation liquid cooling system are 0.27 °C/W and 0.45 °C/W, respectively, in laptop application.

並列關鍵字

Diaphragm ； Micropump ； Piezoelectric device ； Liquid cooling ； Valve

參考文獻

[32] 吳鴻昀《壓電式薄膜微型泵的發展與應用》，國立台灣大學機械工程學系，碩士論文，2008 年1 月

[2] H. T. G. van Lintel, F. C. M. van de Pol, S. Bouwstra “A Piezoelectric Micropump Based on Micromachining of Silicon,” Sensors and Actuators, Vol. 15, Issue 2, pp. 153-167, 1988

[4] J. G. Smits, “Piezoelectric Micropump with Three Valves Working Peristaltically,” Sensors and Actuators A: Physical, Vol. 21, Issues 1-3, pp. 203-206, 1990

[5] R. Zengerle, A. Richter, H. Sandmaier, “A Micro Membrane Pump with Electrostatic Actuation,” An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE Micro Electro Mechanical Systems, MEMS '92, Proceedings., pp. 19-24, 1992

[6] E. Stemme, G. Stemme, “A Valveless Diffuser/Nozzle-Based Fluid Pump,” Sensors and Actuators A: Physical, Vol. 39, Issue 2, pp. 159-167, 1993