用WCIP 法分析射頻微機電開關

Analysis of RF MEMS Switch by WCIP Method

周子皓(Tzu-Hao Chou)

指導教授 ： 黃維信

國立臺灣大學/工學院/工程科學及海洋工程學研究所/碩士(2008年)

https://doi.org/10.6342/NTU.2008.10045

摘要

目前的無線射頻系統而言，欲使微機電元件取代現有無線系統之個別元件，更可以利用它的之好處發展全新架構，更有利於功率及高頻率效率之改善。本篇論文將把重點放在射頻微機電微開關(radio frequency switch)上，將對幾種射頻微機電微開關作分析。
分析方法由WCIP(wave concept iterative procedure)與電磁模擬軟體HFSS(high frequency structure. simulator)所得的結果做比較。其中WCIP為一個電磁波的反覆的計算程序，起先是用在共面波導與微帶線之類的元件，可以敘述電磁波因不同介質而散射與反射，進而對元件特性做出分析。隨著微機電元件的成長，通訊系統上漸漸有微機電元件的運用，故有將WCIP法修改來分析微機電元件的研究，本篇論文主題就是要用此方法來分析射頻微機電開關，已得到對此類開關更多的觀點。

關鍵字

微機電 ； WCIP ； 射頻 ； 開關 ； HFSS

並列摘要

For radio frequency systems, to let MEMS (micro electro mechanical systems) replacing the devices of Wireless, it can be used to develop a new structure and it would be beneficial to improve the efficiency of power and high frequency. This research is focus on analyzing RF
MEMS switch.
We compare the results of WCIP (wave concept iterative procedure) and HFSS (high frequency structure. simulator). WCIP which is electromagnetic wave iterative procedure can show electromagnetic wave scatter and reflect in different medium. Then we analyzed the characteristic of devices. With the development of MEMS device, it is applied to Communication System gradually. Consequently, the research
of analyzing EMES device by WCIP method emerged. This thesis would apply this method to analyze RF MEMS Switch to widen more viewpoint.

並列關鍵字

MEMS ； WCIP ； RF ； switch ； HFSS

參考文獻

1.R. Kastner, and R. Mittra, “A Spectral-Iteration Technique for Analyzing Scattering from Arbitrary Bodies, Part I: Cylindrical Scatterers with E-Wave Incidence,” IEEE Trans. Antennas Propagat, vol. AP-31, No. 3, pp. 499-506, May 1983

2.Z. Feng, W. Zhang, B. Su, K. F. Harsh, K. C. Gupta, V. Bright, and Y. C. Lee, “Design and Modeling of RF MEMS Tunable Capacitors Using Electro-thermal Actuators, ”IEEE MTT-S Digest, vol. pp. 1507-1510, 1999

3.H. C. Lee, J. H. Park, Y. H. Park, “Development of shunt type ohmic RF MEMS switches actuated by piezoelectric cantilever,” Sensors And Actuators A: Physical, vol. pp. 282–290 A 136 2007

4.N.Sboui, A.Gharsallah, A.Gharbi and H.Baudrand, “Global modelling of microwave active circuits by an efficient iterative procedure,” IEE Proc.-Microw.Antennas Propag, vol No.3 pp. 209–212, June 2001

5.N. Sboui, A. Gharsallah, H. Baudrand, and A. Gharbi, “Design And Modeling Of Rf MEMS Switch By Reducing The Number Of Interfaces,” Microwave and Optical Technology Letters, vol. 49, No. 5, pp. 1166-1170,May 2007