壓電懸臂樑式微型能量擷取器之研究

本論文主要在提出壓電懸臂樑式微型能量擷取元件之開發。此微型能量擷取元件能從環境中擷取機械振動能，並將之轉換成電能。此一能量轉換的作用主要是透過鐵電材料鈦鋯酸鉛(PZT)來達成。藉由壓電之d31及d33能量轉換的模式，可分別開發出輸出特性不同的微型能量擷取元件。此外，本論文也開發出雙層壓電材料之懸臂樑式微型能量擷取元件，並可利用雙層材料之串聯及並聯模式提供不同的輸出特性。藉由理論模型的分析，可以分別探討三種懸臂樑式微型能量擷取元件的輸出能量、輸出電壓及最佳阻抗特性。並且推導出設計參數如元件幾何尺寸、壓電材料性質及材料參數對輸出特性的影響。透過微機電製程技術，成功開發出三種微型能量擷取元件，包含採用上下電極輸出的d31模式元件、採用指叉電極輸出的d33模式元件與雙層壓電的d31模式元件。為了提高輸出電壓，壓電層主要是利用沉積效率高且低溫製程的氣膠沉積法進行製作。實驗結果證實了我們開發的微機電元件有能力產生微瓦等級的能量，且輸出電壓高於全橋整流電路的最低要求。

關鍵字

微機電；壓電材料；懸臂樑；能量擷取

並列摘要

Over the years, there has been a growing interest in the field of power harvesting technologies for low-power electronic devices, such as wireless sensor networks and biomedical sensor applications. Of all possible energy sources, the mechanical vibrations have been considered a potential choice for power harvesting in a wide variety of applications. This dissertation presents the development of cantilever-based piezoelectric MEMS power generators which have the ability to scavenge mechanical energy of ambient vibrations and transform it into useful electrical power that can be used in energy storage applications. The piezoelectric MEMS generators utilize the lead zirconate titanate (Pb(Zr,Ti)O3, PZT) material for transforming mechanical strain energy into electrical charge by using the d31 and d33 modes of PZT. A MEMS piezoelectric bimorph generator is also developed with serial and parallel connections. A theoretical model is presented to investigate the relations between the output characteristics and the design parameters of the piezoelectric MEMS generators. To improve the piezoelectric MEMS generator fabrication process, a self-made PZT deposition chamber which could deposit PZT thin film up to tens micron in minutes was used to deposit the piezoelectric layer on the beam structure of the piezoelectric MEMS generator. Experimental results confirm that our devices have the ability to generate power in the micro-watt range and the output voltage is higher than the minimum requirement for diode band-gaps in the rectifier circuit.

並列關鍵字

MEMS ； piezoelectric material ； cantilever beam ； power harvesting

參考文獻

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國際替代計量

壓電懸臂樑式微型能量擷取器之研究

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