光聲光譜氣體感測器之微機電懸臂樑製作研究

Study on Fabrication of MEMS Cantilevers for Photoacoustic Spectroscopy Gas Sensors

林佳潣(Chia-Min Lin)

指導教授 ： 張振豪

共同指導教授 ： 陳建亨(Henry J. H. Chen)

國立暨南國際大學/科技學院/電機工程學系/碩士(2017年)

摘要

本研究利用微機電系統技術開發高靈敏度之懸臂樑光聲光譜感測器，進行懸臂樑感測器元件設計、製作與測試。使用絕緣層上矽晶片中的氧化層當作犧牲層，利用感應耦合電漿離子蝕刻定義懸臂樑輪廓，並蝕刻背基板直到氧化層，最後使用氫氟酸掏空氧化層，完成懸臂樑感測器元件之製作。完成後針對懸臂樑元件特性進行分析，利用白光干涉儀量測懸臂樑的三維表面輪廓，以得知懸臂樑距離水平面之高度差，再經由雷射都卜儀測量出懸臂樑的第一振模頻率，代入公式計算懸臂樑之楊氏係數、彈性常數與離面位移。此微機電懸臂樑將可應用在高靈敏度光聲光譜氣體偵測上。

關鍵字

微機電懸臂樑 ； 光聲光譜 ； 氣體感測器

並列摘要

In this study, micro-electromechanical system (MEMS) cantilevers for the photoacoustic spectroscopy (PAS) gas sensing applications were designed and fabricated. The cantilevers were fabricated on a silicon-on-insulator (SOI) wafer with the buried oxide layer (BOX) as the sacrificial layer. The deep-reactive-ion etching (DRIE, ICP) was used to define the shape of cantilever, and for the through wafer etching. The structure was then released, removing the BOX layer, in hydrofluoric acid solution. The cantilevers were measured under a white light interferometer to determine the static out-of-plane displacement. In order to analyze the physical properties (resonance frequency, Young’s modulus, spring constant, displacement amplitudes) of cantilevers, the measurement was then taken using a laser Doppler vibrometer. This device can achieve better analytical sensitivity, highly linear response, and greater physical movement than that the conventional membrane microphone does.

並列關鍵字

Cantilever ； MEMS ； Photoacoustic spectroscopy

參考文獻

[1] 蕭育仁, 林育德, 李彥希, & 薛丁仁. (2015). 環境室內空氣品質監測用電子鼻: 微型氣體感測器. 國家奈米元件實驗室奈米通訊, 22(3), 40-43. 

[2] Hirschmann, C. B. (2013). Cantilever-enhanced photoacoustic spectroscopy in the analysis of volatile organic compounds. University of Oulu Graduate School, Finland.   

[3] P. Aragon, J. Atienza, and M. D. Climent. (2000). Analysis of Organic

Compounds in Air: A Review, Crit. Rev. Anal. Chem. 30, 121–151.

[4] Besson, J.-P. (2000). Photoacoustic Spectroscopy for Multi-gas Sensing Using Near In-frared Lasers, Ph.D. Thesis, Ecole Polytechnique Federale de Lausanne, La