石英單晶蝕刻行為研究與振盪器設計

Etching-behavior Study of Single Crystal Quartz and Design of Quartz Resonator

葉幸芳(Hsing-Fang Yeh)

指導教授 ： 張家歐

共同指導教授 ： 張簡文添(Wen-Tian Chang Chein)

國立臺灣大學/工學院/應用力學研究所/碩士(2010年)

https://doi.org/10.6342/NTU.2010.01281

摘要

本論文的目的在於研究低溫石英晶圓(α-Quartz)的蝕刻行為、石英振盪器設計與製程的規劃。利用ㄇ字型蝕刻圖案，來研究石英的蝕刻行為如蝕刻速率、底缺面的米勒指標。藉由各蝕刻面的夾角相互關係，來決定晶格面米勒指標(或方向)；使用二維蝕刻理論，量測蝕刻後的晶格面長度變化率來計算晶格面的蝕刻速率。利用實驗所求得的數據，設計雙端固定式石英振盪器的幾何結構與尺寸，與設計製程上所需的光罩圖形尺寸，使其第一彎曲模態的自然頻率達到35kHz。

關鍵字

低溫石英 ； 二維蝕刻理論 ； 米勒指標 ； 石英振盪器

並列摘要

The purpose of this thesis is to study the etching behavior ofα-quartz. We can decide miller indices of lattice planes of etched quartz by measuring the intersecting angles between lattice planes. Using the two dimensional etch theory and measuring the time rate of length can calculate the etch rates of lattice planes. In this thesis, we also design the geometry and size of double-ended tuning fork quartz resonator such that the nature frequency of the first flexible mode matches the requirement of 35kHz.

並列關鍵字

α-quartz ； two dimensional etch theory ； miller indices ； quartz oscillator

參考文獻

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4. Christer Hedlund, Ulf Lindberg, Urban Bucht, and Jan Soderkvist, “Anisotropic etching of Z-cut quartz”, J. Micromech. Microeng. Vol. 3, pp.65-73, 1993

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6. Sungkyu LEE, “Photolithography and Selective Etching of an Array of Surface Mount Device 32.768kHz Quartz Tuning fork Resonators: Definition of Side-Wall Electrodes and Interconnections Using Stencil Mask”, The Japan Society of Applied Physics, Vol. 40, Part. 1, No.9A, pp.5480-5484, 2001