圓管挫曲式微型閥門之研製

Fabrication of Buckled-type Microvalves Using Micro-tubes

劉冠君(Kuan-Chun Liu)

指導教授 ： 楊龍杰

淡江大學/工學院/機械與機電工程學系碩士班/碩士(2006年)

https://doi.org/10.6846/TKU.2006.00760

摘要

本研究使用parylene C材料沈積步階覆蓋良好之特性，將其均勻鍍著於犧牲層(sacrificial layer)毛細玻璃管三維表面上，隨後利用氫氟酸(HF)移除犧牲層，完成一具有圓形橫截面之parylene C高分子薄膜挫曲式導管。該導管利用彎折區阻擋流體，成為構型簡明，不需額外防漏設計且具有零值無益體積(zero dead volume)特性之挫曲式(buckled-type)閥門。
隨後利用SU-8厚膜光阻為材料，多次曝光同次顯影為手法，設計與製作parylene圓管挫曲式微型閥門之可行性驗證模組與仿生式驅動模組。前者成功驗證「彎折導管」原理可止逆流體，實現閥門之功能性；後者則提供以液體表面張力為動力源之元件，使parylene圓管挫曲式閥門彎折區產生角度變化。
成功製備之parylene圓管挫曲式微型閥門，預期進行微流體(microfluidics)的控制，進而應用於生醫實驗室晶片(lab-on-a-chip)。

關鍵字

微機電系統 ； 聚-對二甲苯 ； 挫曲式閥門 ； 圓形微流道 ； SU-8光阻 ； 致動器

並列摘要

This thesis proposes a novel parylene bucked-type valve, which is based on the parylene C technology of good step-coverage characteristic. First conformally depositing the parylene C thin film on sacrificial material of capillary glass tubes, then we remove the embedded capillary tubes via HF acid to obtain the buckled-type circular microchannel of parylene C.
The buckled region stops the flow of liquid, and there is no need of adding sealing parts into the buckled-type valve with almost zero dead volume. Afterwards we integrate SU-8 photolithography into the parylene C process to fabricate a test module for feasibility study and a biomimic driving module of the buckled-type valve. The feasibility test module demonstrates that the parylene buckled-type valve has the same working principle as the “buckled straw”. Meanwhile, the biomimic driving module using surface tension-force makes the actuation angle of buckled region apparent and approves the functionality of the valve device.
Finally, the fabricated parylene buckled-type valves expect to perform as a component to control microfluidics flow and then apply to lab-on-a-chip.

並列關鍵字

MEMS ； Parylene ； Buckled-type valve ； circular microchannel ； SU-8 ； Actuator

參考文獻

[29] 林宏樺，“以聚-對二甲苯微機電技術製作之熱挫曲式微型致動器”，淡江大學機械與機電工程學系碩士學位論文，2005年6月。

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