以聚-對二甲苯微機電技術製作之熱挫曲式微型致動器

The Thermo-buckled Type Actuators Fabricated by Parylene MEMS Technology

林宏樺(Hung-Hua Lin)

指導教授 ： 楊龍杰

淡江大學/工學院/機械與機電工程學系碩士班/碩士(2005年)

https://doi.org/10.6846/TKU.2005.00600

摘要

本研究利用parylene C材料具備之低溫製程特性，以在晶圓上鍍著一層parylene C高分子薄膜開始，並使用正光阻AZ4620作為結構犧牲層（sacrificial layer），搭配無閥幫浦構型設計，包覆以parylene C高分子薄膜為結構層，再配合埋入金屬加熱電阻於parylene C高分子薄膜夾層之間（上、下厚度分別為0.5微米及1微米），最後以丙酮溶除流道或致動薄膜結構層下的犧牲層光阻，製成parylene C熱挫曲致動式中空腔體結構（microchamber），並成功觀察到其推動流體的情況。
本研究採用之熱致動驅動方式，乃是利用加熱電阻造成薄膜膨脹變形，當薄膜受應變而生之負載超過結構發生挫曲最小負載時，致使薄膜發生挫曲，衍生出大變形，而對所建構之空腔結構內液體產生推擠，使薄膜有致動液體之效果。
成功製作之熱挫曲式致動器（thermo-buckled type actuator），預期應用於無閥微型幫浦的製備，進行生醫流體或藥物之輸送。

關鍵字

聚-對二甲苯 ； 熱挫曲 ； 無閥幫浦 ； 致動器

並列摘要

According to the characteristics of parylene, this thesis describes a new type of parylene micropump using the principle of thermo buckling. We first deposit the 1st layer of parylene C on the substrate wafer. Then, we use the photoresist AZ4620 as the sacrificial layer with the flow channel design of valve-less pump, and we deposit the 2nd layer of parylene C as the structured layer of the flow channel wall as well as the actuation membrane. We insert the metal heating electrodes between parylene C layers with different thickness （0.5μm、1μm）. Finally, acetone is used to dissolve the photoresist sacrificial layer inside the parylene C structure, and fully fabricate the parylene C thermo-buckled type actuated microchamber structure. Besides, we successfully observe the actuation of the driving membrane subject to the fluid of DI water.
The fabricated thermo-buckled type micropump can be integrated into the implantable biosensing system for microfludic driving, and drug delivery.

並列關鍵字

parylene ； thermal-buckled ； valve-less pump ； actuator

參考文獻

2. F. R. Liao, et al. “An Implantable Integrated SiGe FM Transmitter for HRV Biotelemetry,” IEEE 2004.

3. K. Walsh, J. Norville and Y. C. Tai, “Photoresist as a sacrificial layer by dissolution in acetone,” Proceeding of the 14TH IEEE MEMS, 2001, pp.114~117.

4. L. J. Yang, T. J. Yao, Y. L. Huang, Y. Xu and Y. C. Tai, “Marching velocity of capillary meniscuses in microchannels,” Proceeding of the 15TH IEEE MEMS, Jan 20-24, 2002, pp.93~96.

5. Y. Mizuno, M. Liger and Y. C. Tai, “Nanofludic flowmeter using carbon sensing element,” Proceeding of the 17TH IEEE MEMS, Jan 25-29, 2004, pp.322~325.

8. C. Xu, W. Lemon and C. Liu, “Design and fabrication of a high-density metal microelectrode array for neural recording,” Sensors and Actuators A, Vol.96, Issue: 1, January 31, 2002, pp.78~85.